A high-sensitive and high accuracy vibrating type
pressure sensor (1) allowing a corrosive
gas pressure to be directly applied thereto, having a
heat resistance, and having no room for mixing of
noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a
fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for
light transmission for changing an internal space in which the vibrator (12) is present into a
vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with
corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the
vacuum chamber (10), mixing of
electromagnetic noise can be eliminated, and since the
resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration device (57) can also be operated by piezo driving and electrostatic driving from the outside without generating
noise.