The invention provides a temperature detection method, a
heating power control method and
semiconductor equipment. The temperature detection method comprises the following steps: acquiring a current
temperature measurement value and a current rotation position of a reference support fork, and determining a current light path included angle according to the current rotation position and the number of support forks; calculating a
temperature correction coefficient according to the current light path included angle, the current
temperature measurement value and the current rotation position; and calculating a current
temperature measurement average value according to the N historical temperature measurement values and the current temperature measurement value, calculating a current temperature measurement correction value according to the
temperature correction coefficient and the current temperature measurement average value, and taking the current temperature measurement correction value as a current temperature detection value output by the temperature
measurement device. According to the method, in the temperature measurement
data processing process, the light path included angle and the rotation position are introduced, compared with an existing data average
processing mode, the temperature measurement
data stability is improved, accurate control over the real-time temperature can be achieved, meanwhile, temperature overshoot is effectively restrained, and therefore the
temperature control stability of the heat treatment cavity is improved.