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33results about How to "Enhance the performance of anti-total dose radiation" patented technology

Manufacture method of VDMOS device with irradiation resistance

The invention discloses a manufacture method of a VDMOS device with irradiation resistance. The manufacture method of the VDMOS device is characterized by forming a gate oxide layer, evaporating aluminum on the gate oxide layer, and then diffusing aluminum at high temperature to form a gate medium of an Si-O-Al structure. Positive charges accumulated in the gate medium can be reduced when the VDMOS device is irradiated; the resistance to total dose irradiation of the device is improved; meanwhile, compared with the conventional silicon dioxide gate medium, the gate medium of the Si-O-Al structure is higher in dielectric constant; the resistance to single event gate rupture of the device can be improved. The manufacture method can be used for effectively overcoming the contradiction of requirements on the thickness of the resistance to total dose irradiation and the single event gate rupture and optimizing the resistance to total dose irradiation and the single event gate rupture at the same time; the process is simple; the resistance to the irradiation of the VDMOS device is improved.
Owner:BEIJING MXTRONICS CORP +1

Bulk-silicon MOSFET structure

ActiveCN103500760AGood single event irradiation effectSuppression of single event radiation effectsSemiconductor devicesPhysicsMOSFET
The invention discloses a bulk-silicon MOSFET (METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR) structure. The bulk-silicon MOSFET structure comprises a p+ layer (2) and an n- layer (3), wherein the p+ layer (2) and the n- layer (3) are directly contacted; the n- layer is made of wide-bandgap 6H-SiC material. The bulk-silicon MOSFET structure disclosed by the invention has the advantage that the radiation resistance of the bulk-silicon structure is improved. Compared with the SOI (Silicon On Insulator) technology, the bulk-silicon MOSFET structure disclosed by the invention has the beneficial effects that the self-heating effect is improved, the total dosage effect is eliminated, and the cost is reduced.
Owner:HARBIN ENG UNIV

Novel anti-radiation device structure

The invention belongs to the technical field of anti-radiation semiconductors, and relates to an SOI device capable of improving anti-radiation performance of the device based on a mainstream semiconductor process condition. The anti-radiation SOI device related by the invention is characterized in that through changing an insulating buried layer, the self-heating effect of the SOI device is reduced; and meanwhile, charges accumulated on a surface of a back gate can be reduced under a radiation condition; through changing a doped structure of an active area, a leakage current produced by a parasitic channel under the radiation condition is reduced, and simultaneously the body contact is realized better; and through changing a BTS structure, under the condition of keeping unchanged length-to-width ratio of the channel and the effective body contact, the layout area can be reduced. A novel anti-radiation device structure, under the condition of being compatible to a mainstream SOI process, can have the characteristics of relatively small self-heating effect, relatively small leakage current and relatively small layout area, etc.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Novel CMOS integrated circuit resisting total dose radiation

The invention discloses a novel CMOS integrated circuit resisting total dose radiation, belonging to the technetronic field. The CMOS integrated circuit comprises NMOS devices and PMOS devices; the devices are separated through grooves; grooves among the PMOS are filled with barrier materials I which generate fixed positive charge under total dose radiation; and grooves among the NMOS are filled with barrier materials II which generate fixed negative charge under the total dose radiation. In addition, grooves between NMOS and PMOS are filled with barrier materials I and II, wherein the barriermaterials I are close to PMOS and the barrier materials II are close to NMOS; or NMOS and PMOS are separated by two adjacent grooves, the groove adjacent to PMOS is filled with the barrier materialsI and the groove adjacent to NMOS is filled with the barrier materials II. The invention can be applied to the field related to total dose radiation such as aerospace, military, nuclear power, high energy physics and the like.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

65nm technology-based super-steep reverse-doping radiation-proof MOS field-effect tube

ActiveCN105514169AImprove radiation resistanceDoes not affect integrationSemiconductor/solid-state device detailsSolid-state devicesSubthreshold oscillationsThreshold voltage
The invention discloses a 65nm technology-based super-steep reverse-doping radiation-proof MOS field-effect tube, mainly solving the problems of increased OFF leakage current, threshold voltage drift and subthreshold oscillation amplitude degradation of a conventional 65nm MOS field-effect tube under a total dose radiation environment. The MOS field-effect tube comprises a P-type substrate (1) and an epitaxial layer (2) located on the substrate, wherein an isolation groove (3) is formed around a place above the epitaxial layer, a grid electrode (4) is arranged at the middle above the epitaxial layer, a source region (5) and a drain region (6) are arranged in the epitaxial layer between two side boundaries of the grid electrode and the inner boundary of the isolation groove, light-doping source-drain regions (7) are arranged in the epitaxial layer below the two side boundaries of the grid electrode, a channel is formed in an area between the two light-doping source-drain regions and right below the grid electrode, and a heavy-doping super-steep reverse-doping region (8) is arranged below the channel between the two light-doping source-drain regions. The 65nm technology-based super-steep reverse-doping radiation-proof MOS field-effect tube improves the total dose irradiation resistance of a device, and can be used for the preparation of large scale integrated circuits.
Owner:XIDIAN UNIV

Gate-all-around anti-irradiation MOS field effect transistor based on 65 nm technology

The present invention discloses a gate-all-around anti-irradiation MOS field effect transistor based on a 65 nm technology for mainly solving the problems of threshold voltage drift, subthreshold swing degeneration and off-state leakage current degeneration of a conventional 65 nm MOS field effect transistor under a total dose radiation environment. The gate-all-around anti-irradiation MOS field effect transistor based on the 65 nm technology comprises a P-type substrate (1) and an epitaxial layer (2) located on the substrate, a drain region (3) is arranged in the middle of the epitaxial layer, and a grid (4) is arranged above the epitaxial layer adjacent to the periphery of the drain region (3). Light doping source drain regions (5) are arranged in the epitaxial layer below the boundaries at the inner and outer sides of the grid, an area between the light doping source drain regions forms a channel, and a source region (6) is arranged in the epitaxial layer adjacent to the periphery of the grid. An isolating groove (7) is arranged in the epitaxial layer adjacent to the periphery of source region, and a grating ring, a source ring and an isolating groove ring sleeve structure surrounding the exterior of an active region orderly are formed. The gate-all-around anti-irradiation MOS field effect transistor based on the 65 nm technology of the present invention enables the device anti-total dose radiation capability to be improved, and can be used to manufacture a large-scale integrated circuit.
Owner:XIDIAN UNIV

Redundant doping radiation-proof MOS (Metal Oxide Semiconductor) field-effect tube based on 65nm process

The invention discloses a redundant doping radiation-proof MOS (Metal Oxide Semiconductor) field-effect tube based on a 65nm process, and mainly solves that a traditional 65nm MOS field-effect tube has the problems of threshold voltage drifting, sub-threshold swing degeneration and the degeneration of OFF leakage current under a total dose irradiation environment. The field-effect tube comprises a P-type substrate (1) and epitaxial layers (2) located on a substrate, wherein isolation grooves (3) and grids (6) are respectively arranged all around the upper parts and middle parts of the epitaxial layers, the epitaxial layers between the two side boundaries of a grid and the boundaries in the isolation grooves are internally provided with source and drain active areas (4), and the epitaxial layers below the two side boundaries of the grid are internally provided with light dope source and drain areas (5); a channel is formed in an area between the two light dope source and drain areas (5) is located just below the grid, and a redundant doping areas (7) are inserted in the interfaces of the epitaxial layers at the bottom of the two side isolating grooves which are parallel to the length direction of the channel. According to the MOS field-effect tube provided by the invention, the total dose resistant radiation capacity of devices can be improved, and the field-effect tube can be used for preparing massive integrated circuits.
Owner:XIDIAN UNIV

SOI device resistant to total dose radiation and manufacturing method thereof

The invention discloses a polysilicon-based SOI device resistant to total dose radiation and a manufacturing method thereof, belonging to the field of electric technology. The SOI device comprises a substrate layer, a buried oxide layer and a top layer, wherein the buried oxide layer comprises a polysilicon sacrificial layer and generates fixed negative charges in the polysilicon sacrificial layer; the substrate layer is made of P-type silicon; and the buried oxide layer is made of silicon dioxide. The manufacturing method comprises the following steps: a) forming a first SiO2 layer on the silicon wafer by thermal oxide growth; b) forming the polysilicon sacrificial layer on the first SiO2 layer by low pressure chemical vapor deposition; c) forming a second SiO2 layer on the polysilicon sacrificial layer by thermal oxide growth; and d) forming the P-type silicon layer on the second SiO2 layer by low pressure chemical vapor deposition. The invention can be applied to such industries related to total dose radiation as aerospace, military, nuclear power, high-energy physics and the like.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

Junction terminal structure for power device

The invention relates to the technical field of power semiconductors, in particular to a junction terminal structure capable of improving the total dose radiation resistance. The junction terminal structure is mainly characterized in that different thicknesses of field oxide layers are arranged on both sides above a field limiting ring, and polycrystalline silicon field plates are arranged on both sides above the field limiting ring; since the thicknesses of the field oxide layers below the polycrystalline silicon field plates are different, a height difference exists in the longitudinal direction of the polycrystalline silicon filed plates on both sides; a structure with a capacitor function is formed by the polycrystalline silicon field plate structures which are formed in a staggered manner and the field oxide layer structure below the polycrystalline silicon field plates, an overlaying effect formed by total dose radiation to an electric field below the field plate on the right side is weakened by redistribution, and thus the voltage endurance capability of a junction terminal after total dose radiation is improved to a certain degree. According to the junction terminal structure disclosed by the invention, the total dose radiation resistance of the device is improved on the premise of not increasing the area of the junction terminal, so that the voltage endurance drop caused by radiation is reduced, and the demands under high-power and complex environment application are met. The junction terminal structure is especially applicable to power semiconductor devices.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Integrated circuit resisting NMOS element total dose radiation based on materials with high dielectric constants

The invention discloses an integrated circuit resisting NMOS element total dose radiation based on materials with high dielectric constants, belonging to the technical field of electronics. The integrated circuit resisting NMOS element total dose radiation comprises an NMOS element and can also comprise a PMOS element, wherein the elements are insulated by a groove on a substrate. The integrated circuit resisting NMOS element total dose radiation is characterized in that an interface material with a high dielectric constant exists between a groove filling material and a substrate material in the groove adjacent to the NMOS element. The dielectric constant of the interface material is preferably larger than 3.9. The interface material can be one or more selected from nickel oxide, zirconiumoxide, lead oxide, aluminum oxide, nitrogen oxide, lanthanum oxide, hafnium oxide and tantalum oxide. The invention can be applied to spaceflight, military, nuclear power, high energy physics and other industries relevant to total dose radiation.
Owner:PEKING UNIV

SOI device resistant to total dose radiation and manufacturing method thereof

The invention discloses an SOI device resistant to total dose radiation and a manufacturing method thereof, belonging to the field of electric technology. The SOI device comprises a substrate layer, a buried oxide layer and a top layer, wherein a sacrificial layer is arranged between the buried oxide layer and the substrate layer and generates negative charges after the SOI device is subjected to total dose radiation; the sacrificial layer is made of silicon nitride; the substrate layer is made of P-type silicon; and the buried oxide layer is made of silicon dioxide. The manufacturing method comprises the following steps: a) forming the SiO2 buried oxide layer on the silicon wafer; b) forming the silicon nitride sacrificial layer on the SiO2 buried oxide layer; and c) forming the P-type silicon substrate layer on the silicon nitride sacrificial layer. The invention can be applied to such industries related to total dose radiation as aerospace, military, nuclear power, high-energy physics and the like.
Owner:PEKING UNIV

Novel integrated circuit resisting NMOS element total dose radiation

The invention discloses a novel integrated circuit resisting NMOS element total dose radiation, belonging to the technical field of electronics. The novel integrated circuit resisting NMOS element total dose radiation comprises an NMOS element and can also comprise a PMOS element, wherein the elements are insulated by a groove on a substrate. The novel integrated circuit resisting NMOS element total dose radiation is characterized in that a silicon dioxide material prepared through steam oxidation exists between a groove filling material and a substrate material in the groove adjacent to the NMOS element. The silicon dioxide prepared through steam oxidation is prepared by the following method: introducing mixed gases of high purity water and oxygen into an interface containing silicon to oxidize the silicon in the interface so as to obtain silicon dioxide. The invention can be applied to spaceflight, military, nuclear power, high energy physics and other industries relevant to total dose radiation.
Owner:PEKING UNIV

Integrated circuit resisting NMOS element total dose radiation

The invention discloses an integrated circuit resisting NMOS total dose radiation, belonging to the technical field of electronics. The integrated circuit resisting NMOS total dose radiation comprisesan NMOS element and can also comprises a PMOS element, wherein the elements are insulated by a groove on a substrate. The integrated circuit resisting NMOS total dose radiation is characterized in that an insulation material exists between a groove filling material and a substrate material in the groove adjacent to NMOS element and generates fixed negative charges under total dose radiation. Theinsulation material is selected from silicon nitride, titanium nitride and tantalum nitride or a mixture thereof. The thickness of the insulation material ranges from 10 nm to 80 nm. The invention canbe applied to spaceflight, military, nuclear power, high energy physics and other industries relevant to total dose radiation.
Owner:PEKING UNIV

Novel integrated circuit resisting NMOS element total dose radiation

The invention discloses a novel integrated circuit resisting NMOS total dose radiation, belonging to the technical field of electronics. The novel integrated circuit resisting NMOS total dose radiation comprises an NMOS element and can also comprises a PMOS element, wherein the elements are insulated by a groove on a substrate. The novel integrated circuit resisting NMOS total dose radiation is characterized in that: in the groove a adjacent to the NMOS element, an air interface layer exists between a groove filling material and a substrate material arranged at one side of the groove filling material, and another air interface layer also exists between the groove filling material and a substrate material arranged at the other side of the groove filling material. The air interface layers are formed through etching contact parts among the groove filling material and the substrate materials. The invention can be applied to spaceflight, military, nuclear power, high energy physics and other industries relevant to total dose radiation.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

A kind of vdmos device manufacturing method with anti-irradiation performance

The invention discloses a manufacture method of a VDMOS device with irradiation resistance. The manufacture method of the VDMOS device is characterized by forming a gate oxide layer, evaporating aluminum on the gate oxide layer, and then diffusing aluminum at high temperature to form a gate medium of an Si-O-Al structure. Positive charges accumulated in the gate medium can be reduced when the VDMOS device is irradiated; the resistance to total dose irradiation of the device is improved; meanwhile, compared with the conventional silicon dioxide gate medium, the gate medium of the Si-O-Al structure is higher in dielectric constant; the resistance to single event gate rupture of the device can be improved. The manufacture method can be used for effectively overcoming the contradiction of requirements on the thickness of the resistance to total dose irradiation and the single event gate rupture and optimizing the resistance to total dose irradiation and the single event gate rupture at the same time; the process is simple; the resistance to the irradiation of the VDMOS device is improved.
Owner:BEIJING MXTRONICS CORP +1

A vdmos device with anti-total dose radiation and its manufacturing method

The invention provides a VDMOS device with total dose irradiation resistance and a manufacturing method thereof. The device comprises a composite gate oxide layer, a polysilicon gate electrode and anN-epitaxial layer. The composite gate oxide layer comprises a silicon dioxide layer and a silicon nitride layer, and the composite gate oxide layer is between the N-epitaxial layer and the polysilicongate. The present invention provides the VDMOS device with a two-layer composite gate oxide structure and total dose irradiation resistance and the manufacturing method thereof.
Owner:浙江航芯源集成电路科技有限公司

Total dose radiation resistant strengthening method of a flash memory

The invention provides a total dose radiation resistant strengthening method of a flash memory, which comprises the following steps of: 1, providing a flash memory array and a monitoring memory arrayadjacent to the flash memory array; 2, when that flash memory array does not work, closing the connection between the flash memory array and the peripheral circuit, so that the monitor memory array starts to work, and applying a read voltage to the grid of the monitoring array unit; 3, comparing the total current output of the bit line of the monitoring memory array with a reference current threshold; 4, judging the comparison result, and if the total current of the bit line is less than the reference current, reading the monitor memory array again after a fixed time interval; if the total bitline current is greater than or equal to the reference current, performing a refresh operation on the flash memory array and the monitor memory array. The invention can detect leakage current by monitoring the magnitude of the bit line current of the memory array, and improve the total dose radiation resistance ability of the memory array.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

A dielectric isolation structure and method for SOI process

The invention relates to a dielectric isolation structure and a dielectric isolation method for an SOI technology. The isolation structure comprises a P-type substrate, a buried oxide layer, SOI material top silicon, a full dielectric isolation trench, a partial dielectric isolation trench, a linear oxide layer, and an oxide layer or an oxide insulation layer. The full dielectric isolation trench and the partial dielectric isolation trench are disposed inside the SOI material top silicon and above the buried oxide layer. The linear oxide layer is disposed on the inner surfaces of the full dielectric isolation trench and the partial dielectric isolation trench. The oxide layer or the oxide insulation layer is surrounded by the linear oxide layer, and is disposed inside the full dielectric isolation trench and the partial dielectric isolation trench. The linear oxide layer is disposed between the isolation trenches and the SOI material top silicon. The radiation resistance of an integrated circuit is improved. Moreover, the complexity and difficulty of the SOI full dielectric isolation process of a thick silicon film under the process condition of big line width are reduced, the field region and the full-dielectric isolation region are formed at the first attempt, and a smooth silicon surface is ensured.
Owner:58TH RES INST OF CETC

CMOS integrated circuit resisting total dose radiation

The invention discloses a CMOS integrated circuit resisting total dose radiation, belonging to the technical field of electronics. The CMOS integrated circuit resisting total dose radiation comprises an NMOS element and a PMOS element which are insulated by a groove. The CMOS integrated circuit resisting total dose radiation is characterized in that the groove is filled with a mixture of a first insulation material and a second insulation material, wherein the first insulation material generates fixed positive charges under the total dose radiation, the second insulation material generates fixed negative charges under the total dose radiation, and the mixture is in weak charges or electric neutrality. The invention can be applied to spaceflight, military, nuclear power, high energy physics and the other industries relevant to total dose radiation.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

SOI device resistant to total dose radiation and manufacturing method thereof

The invention discloses a polysilicon-based SOI device resistant to total dose radiation and a manufacturing method thereof, belonging to the field of electric technology. The SOI device comprises a substrate layer, a buried oxide layer and a top layer, wherein the buried oxide layer comprises a polysilicon sacrificial layer and generates fixed negative charges in the polysilicon sacrificial layer; the substrate layer is made of P-type silicon; and the buried oxide layer is made of silicon dioxide. The manufacturing method comprises the following steps: a) forming a first SiO2 layer on the silicon wafer by thermal oxide growth; b) forming the polysilicon sacrificial layer on the first SiO2 layer by low pressure chemical vapor deposition; c) forming a second SiO2 layer on the polysilicon sacrificial layer by thermal oxide growth; and d) forming the P-type silicon layer on the second SiO2 layer by low pressure chemical vapor deposition. The invention can be applied to such industries related to total dose radiation as aerospace, military, nuclear power, high-energy physics and the like.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

Total dose radiation resistant strengthening method of a flash memory circuit

ActiveCN109215715AImprove the ability to resist total dose radiationEnhance the performance of anti-total dose radiationRead-only memoriesVoltageRadiation resistant
The invention provides a total dose radiation resistant strengthening method of a flash memory circuit, which comprises the following steps of: 1, providing a flash memory array and adding a monitoring memory array with a pre-stored logic value of 0 connected to the flash memory array; 2, determining the read voltage of the monitoring memory array; 3, determining a threshold value of a number of monitor memory array cells whose logical value changes to 1; 4, sequentially reading the read data of the monitoring memory array unit and adding the read data under the working state of the flash memory array; 5, comparing the addition result with the quantity threshold value of the monitoring memory array cell, and clearing the addition result when the addition result is less than the quantity threshold value; when the addition result is greater than or equal to the number threshold, refreshing the flash memory array and the monitor memory array. The invention can detect the leakage of the memory array in advance and refresh the memory array in time, thereby improving the total dose radiation resistance of the memory array and ensuring the stability of the device.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

A power device junction terminal structure

The invention relates to the technical field of power semiconductors, in particular to a junction terminal structure capable of improving the ability to resist total dose radiation. In the present invention, field oxide layers with different thicknesses are mainly arranged on both sides above the field limiting ring, and there are polysilicon field plates on both sides above the ring. Since there is a difference in the thickness of the field oxide layer below the polysilicon field plate, the polysilicon field plates on both sides are vertically There is a height difference, and the staggered polysilicon field plate structure and the field oxide layer structure below form a capacitive structure, and the redistribution weakens the superimposed effect of the electric field formed under the right field plate due to the total dose irradiation, so that The voltage resistance of the junction terminal after the total dose irradiation is improved to a certain extent. On the premise of not increasing the terminal area of ​​the junction, the invention improves the anti-total dose radiation capability of the device, reduces the withstand voltage drop caused by radiation, and satisfies the requirements of high-power and complex environment applications. The invention is particularly applicable to power semiconductor devices.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Method for improving total dose irradiation resistance of FinFET device

The invention discloses a method for improving the total dose irradiation resistance of a FinFET device. According to the method, the trap charge density of an oxide layer and the crystal orientationdependence of an interface state are utilized; during layout design, the placement direction of the device is properly adjusted; the channel crystal orientation of the FinFET device is ensured to be (100), so the oxide layer trapped charge density and the interface state density generated in the prepared FinFET device by the total dose irradiation are lower, the influence of the total dose irradiation on the FinFET device is reduced, and the total dose irradiation resistance of the FinFET device is improved.
Owner:PEKING UNIV

Anti-Total Dose Effect Reinforcement Method for Flash Storage Circuit

The present invention provides a flash memory storage circuit anti-total dose effect reinforcement method, comprising: step 1, providing a flash memory storage array; step 2, compiling initial information into coded information, and inputting the flash memory storage array, the binary code in the coded information " The number of "0" and "1" is equal; Step 3, interpret the coding information in the flash memory storage array, and count the number of binary codes "0" and "1" obtained from the interpretation; Step 4, compare the statistical results, When the numbers of the interpreted binary codes "0" and "1" are equal, the coded information is decoded and read; when the interpreted numbers are not equal, the read voltage of the flash storage array is adjusted until the interpreted binary code "" The number of 0" and "1" is equal. The invention can effectively maintain the performance stability of the flash storage circuit by adjusting the reading voltage.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

A method for preparing redundant doped anti-radiation mos field effect transistor based on 65nm process

The invention discloses a redundant doping radiation-proof MOS (Metal Oxide Semiconductor) field-effect tube based on a 65nm process, and mainly solves that a traditional 65nm MOS field-effect tube has the problems of threshold voltage drifting, sub-threshold swing degeneration and the degeneration of OFF leakage current under a total dose irradiation environment. The field-effect tube comprises a P-type substrate (1) and epitaxial layers (2) located on a substrate, wherein isolation grooves (3) and grids (6) are respectively arranged all around the upper parts and middle parts of the epitaxial layers, the epitaxial layers between the two side boundaries of a grid and the boundaries in the isolation grooves are internally provided with source and drain active areas (4), and the epitaxial layers below the two side boundaries of the grid are internally provided with light dope source and drain areas (5); a channel is formed in an area between the two light dope source and drain areas (5) is located just below the grid, and a redundant doping areas (7) are inserted in the interfaces of the epitaxial layers at the bottom of the two side isolating grooves which are parallel to the length direction of the channel. According to the MOS field-effect tube provided by the invention, the total dose resistant radiation capacity of devices can be improved, and the field-effect tube can be used for preparing massive integrated circuits.
Owner:XIDIAN UNIV
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