According to the
machine defect trend and historical action rapid query method and device, the medium, the program product and the terminal, integrated query and analysis functions are provided, and the
machine management and
fault handling capacity is remarkably improved. A user can easily inquire detailed actions and states of a
machine and obtain a closed-loop result of a case so as to evaluate the effect of improvement measures, and all information is presented through a visual chart. The machine state chart and defect
data analysis are integrated, a user can comprehensively understand the historical operation condition of the machine, identify abnormal reasons and effective countermeasures, and provide a basis for quick response, so that the
wafer influence quantity is reduced, and the yield fluctuation is controlled. And real-time and historical
data query is supported, so that the working efficiency is greatly improved, and the problems of
low speed and tedious process of manual query are avoided. Meanwhile, the
database comprehensively records detailed action information of the machine, data incompleteness is overcome, and a user can analyze defect distribution and
directivity problems in a
specific time period.