43results about How to "Sufficient throughput" patented technology

An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity / autoposition channel, an alignment / registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity / autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment / registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal / background ratio of the present system.

An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

A method and apparatus for eliminating mold spores, pathogens and odor from material like equine bedding. The apparatus includes two or more pairs of augers including blades to control the size of the material and to move it in a zigzag fashion through heat.

The present invention achieves sufficient throughput even when a provisional frequency-switching technology is used in TDD. A user terminal that comprises: a transmission / reception unit that performsuplink transmission and / or downlink reception via a first cell; and a control unit that controls the transmission / reception unit such that the transmission / reception unit transmits capability information related to UL reference signal switching that is for switching from the first cell to a second cell that is different from the first cell and transmitting a UL reference signal.

According to one embodiment, a cargo inspection method includes transporting a first guideway vehicle over a guideway from a first inspection station to a second inspection station. A first non-intrusive scanning mechanism associated with the first inspection station is used to acquire a first set of data associated with cargo stored in the first guideway vehicle. The first set of data acquired by the first non-intrusive scanning mechanism associated with the first inspection station is analyzed to determine the identity of the cargo stored on the first guideway vehicle. The first set of data acquired by the first non-intrusive scanning mechanism is compared with a first manifest that describes the cargo that is declared to be stored on the first guideway vehicle. It is determined that the first guideway vehicle contains contraband cargo if the identity of the cargo does not match the first manifest.

The system for drawing a pattern on a resist layer covering a semiconductor wafer, comprising an electron gun housing unit provided with a plurality of small-sized electron guns (wherein the housing unit has a hollow column section for releasing an electron beam, and a micro deflection unit is disposed inside for adjusting the inclination of the electron beam), a movable stage capable of moving in the X-Y directions, a wafer stage disposed on the movable stage to support a semiconductor wafer, a mask wafer having struts on its rear side for supporting membranes on which a pattern to be transferred is formed, a mask stage for holding the mask wafer, a matching detection unit for detecting a misalignment between the mask wafer and the semiconductor wafer, and an inclination means connected to the micro deflection unit and the matching detection unit for inclining the electron beam.