The invention relates to a
graphene-PDMS flexible substrate electrocardiogram dry
electrode based on a tip array structure and a preparation method thereof. a
graphene-PDMS flexible substrate is designed on a top surface thereof, a paraxylene film is deposited on tip array structure,
metal seed layer is sputtered on paraxylene film, a
metal lalyer is sputtered on the
metal seed layer. The bottom surface of the
graphene-PDMS flexible conductive substrate is coated with a conductive
silver paste layer. The process of the invention is simple, the cost is low, and the production of the mould is favorable for
batch production. The materials such as conductive
silver colloid, PDMS, graphene, paraxylene film and sputtered
titanium and gold have good biological compatibility, and can effectively inhibit
bacteria and reduce
skin irritation. The tip array structure designed by the invention has a larger contact area, and can pass through the
stratum corneum by directly contacting with the
skin,so that
contact impedance of the
skin-
electrode can be effectively reduced, thus obtaining a stable
ECG signal.