Patents
Literature
1 results about "Spin–lattice relaxation" patented technology
Efficacy Topic
Property
Owner
Technical Advancement
Application Domain
Technology Topic
Technology Field Word
Patent Country/Region
Patent Type
Patent Status
Application Year
Inventor
In nuclear magnetic resonance, Spin–lattice relaxation is the mechanism by which the component of the total nuclear magnetic moment vector which is parallel to the constant magnetic field relaxes from a higher energy, non-equilibrium state to thermodynamic equilibrium with its surroundings (the "lattice"). It is characterized by the spin–lattice relaxation time, a time constant known as T₁.
Polishing pads and methods for manufacturing semiconductor devices using them
PendingCN122138886AAbrasion apparatusAnalysis using nuclear magnetic resonanceDevice materialPhysical chemistry
According to one embodiment, a polishing pad includes a polishing layer comprising a urethane-based prepolymer and a curing agent, wherein the spin-lattice relaxation time (T1) and spin-spin relaxation time (T2) measured using TD-NMR for the polishing layer satisfy Equations 1 and 2, respectively, and thus can improve the performance of the polishing pad.
Owner:SK ENPULSE CO LTD