The utility model provides a kind of
silicon wafer tank type
processing equipment, it includes tank body, the positioning base of being arranged in the tank body bottom, be arranged in the
silicon wafer basket on the positioning base, first air
pipe group and second air
pipe group,
silicon wafer is vertically, stacked loading in the silicon wafer basket, first air
pipe group is horizontally arranged and is parallel to the stacking direction of silicon wafer, in vertical direction, first air pipe group is higher than second air pipe group, first air pipe group provides horizontal
airflow to the side of silicon wafer, second air pipe group provides oblique
airflow to the side of silicon wafer.The utility model is set above, both can guarantee that liquid
medicine and silicon wafer are fully contacted, also avoid the phenomenon of silicon wafer tooth and patching due to bubble
impact, in subsequent process, reduce the generation of fragment and scorched piece, substantially improve product yield;Meanwhile, equipment operation stability improves, production efficiency is optimized, reduce the cost loss due to defective product.