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2results about How to "Avoid tooth loss" patented technology

Silicon wafer tank processing apparatus

ActiveCN224368252U
The utility model provides a kind of silicon wafer tank type processing equipment, it includes tank body, the positioning base of being arranged in the tank body bottom, be arranged in the silicon wafer basket on the positioning base, first air pipe group and second air pipe group, silicon wafer is vertically, stacked loading in the silicon wafer basket, first air pipe group is horizontally arranged and is parallel to the stacking direction of silicon wafer, in vertical direction, first air pipe group is higher than second air pipe group, first air pipe group provides horizontal airflow to the side of silicon wafer, second air pipe group provides oblique airflow to the side of silicon wafer.The utility model is set above, both can guarantee that liquid medicine and silicon wafer are fully contacted, also avoid the phenomenon of silicon wafer tooth and patching due to bubble impact, in subsequent process, reduce the generation of fragment and scorched piece, substantially improve product yield;Meanwhile, equipment operation stability improves, production efficiency is optimized, reduce the cost loss due to defective product.
Owner:JIANGSU RUNERGY CENTURY PHOTOVOLTAIC TECH CO LTD