The invention relates to a sub-temperature carburizing heat treatment method for reducing heat treatment deformation of thin-walled gears, comprising the following steps: S1, sub-temperature normalizing in advance; S2, slow shot peening; S3, sub-temperature carburizing: adopting gradient heating to sub-temperature Warm carburizing temperature, sub-temperature carburizing process adopts two-stage carburizing method, the first stage is the strong infiltration stage, and the second stage is the diffusion stage; S4, gradient slow cooling and quenching: first, the thin-walled gear forgings that have completed carburizing treatment Gradient slow cooling to 840-860°C, and keep warm for about 1h; then continue to cool slowly to 815-825°C, and keep warm for about 1h, during which the carbon potential in the furnace is controlled at 0.5±0.05%, and then quenched in polyvinyl alcohol solution; S5, low temperature tempering. The invention can greatly reduce the degree of deformation of the gear workpiece, significantly improve the production pass rate, and at the same time can effectively refine the grains, improve the hardness and strength of the gears, and significantly increase the service life of the gears. In addition, the refined grains can significantly improve The speed of carburizing reduces process time and reduces energy consumption.