The invention relates to the technical field of vacuum adsorption manipulators, and discloses a wafer transmission device and a vacuum adsorption manipulator thereof. The vacuum adsorption mechanical arm for wafer transmission comprises a base, a supporting ring, a rotating supporting plate, a supporting column, a rotating structure, a lifting structure, a telescopic structure and an adsorption structure, the rotating structure is arranged in the base, the lifting structure is arranged in the base, and the telescopic structure and the adsorption structure are arranged on the supporting column. The rotation structure controls the rotation of the manipulator, the lifting structure controls the up-down movement of the manipulator, the telescopic structure controls the stretching of the manipulator, and the adsorption structure is matched to adsorb and rotate the wafer, so that the adsorption capacity is good, the posture is flexible and adjustable in the adsorption transportation process, the transportation space is small, and the production line investment is reduced; and through single-point adsorption of the telescopic adsorption nozzle, the warped wafer can still be adsorbed on the wafer manipulator, the quality safety of the wafer is guaranteed, reliable adsorption can be achieved in the mode that the wafer is perpendicular to the ground, and the application range is wide.