The invention discloses a rotary spraying type
wafer wet
processing all-in-one
machine, which comprises a
wafer processing cylinder, a spraying mechanism, a driving mechanism, a filtering mechanism and a
liquid storage tank, and is characterized in that the
wafer processing cylinder is provided with a processing cavity, and a rotary frame is arranged in the processing cavity; the driving mechanism is used for driving the rotating frame to rotate, the spraying mechanism is used for spraying liquid
medicine to a wafer, the filtering mechanism comprises a filtering box and a filtering part, the liquid discharging
pipe is used for discharging the treated mixed liquid into the filtering part, the
liquid storage tank is used for storing the filtered liquid
medicine, and after the treated mixed liquid is filtered by the filtering part, the liquid
medicine enters the cavity. And the filtered liquid medicine in the cavity flows into the
liquid storage tank through the pipeline. According to the rotary spraying type wafer wet processing all-in-one
machine, through cooperation of the spraying mechanism, the driving mechanism, the filtering mechanism and the
liquid storage tank,
automatic filtering of mixed liquid is achieved, frequent operation of operators is not needed, time and labor are saved, meanwhile, liquid medicine or cleaning liquid flowing back to the
liquid storage tank can be reused after being finely filtered, and the efficiency is improved. And the
processing cost of the wafer is greatly reduced.