The present invention provides a
capacitance-type inertial sensor digital
servo circuit. The
capacitance-type inertial sensor digital
servo circuit comprises a
capacitance-type sensor, a reading-out amplification circuit, an analog-
digital converter (ADC), a digital
loop filter, a multi-digit quantizer and a pulse-width modulation generator. The capacitance-type sensor, the reading-out amplification circuit, the analog-
digital converter (ADC), the digital
loop filter, the multi-digit quantizer and the pulse-width modulation generator are connected in order and form a loop. Through adoption of the digital
loop filter, the capacitance-type inertial sensor digital
servo circuit is high in flexibility and accuracy; through adoption of the multi-digit quantizer, the capacitance-type inertial sensor digital servo circuit realizes multi-digit quantification and has small quantification
noise, high
linearity and high duty ratio; and moreover, through adoption of the pulse-width modulation generator, the capacitance-type inertial sensor digital servo circuit generates differential force
feedback control signals to realize multi-digit force
feedback control so as to greatly reduce the nonlinearity introduced by a common analog-
digital converter (DAC) and improve the inhibition capability for common-mode
noise.