The feeding device for the
diffusion furnace comprises a base plate, electric telescopic rods are fixedly installed on the two sides of the top of the base plate, a limiting plate is fixedly installed at the driving ends of the electric telescopic rods, and a first motor is fixedly installed on the limiting plate through an installation plate installed on one side of the limiting plate. And a
threaded rod is fixedly mounted at the driving end of the first motor. According to the feeding device for the
diffusion furnace, the base plate, the universal wheels, the electric telescopic rods, the fixing plate, the clamping columns, the horizontal clamping plate, a plugging plate, a supporting frame, an adjusting block, a
threaded rod, a limiting groove, a first motor, a limiting plate, a sliding block, a worm gear, a worm, a movable block, a second lead screw, a vertical groove and a second motor are used in cooperation; according to the feeding device, relative movement or opposite movement between the two horizontal clamping plates is achieved in a mechanical
driving mode, and a
silicon wafer can be conveniently and rapidly clamped and disassembled.