195results about How to "Prevent liquefaction" patented technology

The invention discloses a preparation of underwater grouting grout based on soft-base large immersed tunnel foundation and a grouting process thereof. The foundation is formed by a 60-cm thick macadam foundation base and a 40-cm thick sodium bentonite mortar foundation and is capable of meeting requirements for tunnel foundation rigidity and requirements for base seismic resistance and water flow scouring resistance. The grout is composed of cement, fine sand, coal ash and sodium bentonite. The grouting process is improved, and pipe inside grouting of embedded grouting holes is adopted. Therefore, large ships are not required to work on river face, underwater operation of divers and navigation risks are reduced, construction safety is greatly improved, and construction cost is reduced. The secondary grouting technology is first adopted in the field of the immersed tunnel to reduce uneven sedimentation in future operation stage of projects. The grouting process provides a reference guide and an experience guide for large dock projects, immersed tunnel projects, municipal administration soft earth foundation strengthening projects, high earthquake region basic project design and other similar projects.

The invention belongs to the related technical field of clean renewable energy sources. The invention discloses a solid oxide fuel cell power generation system based on oil fuel. The power generationsystem comprises a solid oxide fuel cell stack, an air heat exchanger, a combustion chamber, a fuel reformer, a steam evaporator and a premixer, wherein the air heat exchanger is connected to a cathode of the solid oxide fuel cell stack, the fuel reformer is connected to an anode of the solid oxide fuel cell stack, and the combustion chamber is connected to a tail gas outlet of the solid oxide fuel cell stack; the combustion chamber is respectively communicated with the air heat exchanger, the fuel reformer and the premixer; the water vapor evaporator is connected to the premixer; tail gas generated by the solid oxide fuel cell stack enters the combustion chamber and is subjected to catalytic combustion in the combustion chamber to obtain hot gas flow, and the hot gas flow enters the air heat exchanger, the fuel reformer and the premixer according to a preset volume ratio. According to the invention, the energy utilization efficiency is improved. The system is simplified.

An engine includes a pre-chamber jet igniter which injects at least one jet combustion flame into the combustion chamber from the outside of the combustion chamber in which the piston reciprocates to generate power so that the injected jet combustion flame is utilized as the source of ignition of the fuel injected into the space in the combustion chamber to drive the explosion stroke such that combustion of the combustion chamber can be maintained reliable by the use of jet combustion flames in the form of large flame kernels, fuel consumption can be remarkably improved and the generation of NOx can be remarkably reduced using rapid cold combustion which is caused by the continuously reliable combustion, and, in particular, it is possible to prevent liquefaction of the air-fuel mixture due to variations in the flow and pressure of the air-fuel mixture flowing in the combustion chamber.

The invention discloses a corrosion testing device capable of simulating the complex environment and a testing method thereof. The device comprises a dynamic high-temperature autoclave system, a medium circulation system and a gas mixing system which can be used for conducting corrosion tests on a sample; the medium circulation system cooperates with the dynamic high-temperature autoclave system so that the medium in the testing environment can be replaced or circulated, and thus the solution medium or flow velocity under the actual working condition is simulated; the gas mixing system is communicated with and cooperate with the dynamic high-temperature autoclave system to simulate the gas composition and pressure environment required by the tests; the dynamic high-temperature autoclave system is internally provided with a medium temperature controller which is used for simulating the temperature under the actual working condition. According to the testing device, multiple types of testing parameters are considered comprehensively, an expansion interface is provided, multiple types of actual working conditions can be effectively simulated, corrosion performance evaluation and research of multiple types of materials, such as stress corrosion, uniform corrosion, erosion corrosion, pitting corrosion, crevice corrosion, electrochemical corrosion, coating corrosion resistance evaluation and corrosion inhibitor efficiency evaluation, in the complex environment are completed, and correctness and scientificity of the test result are guaranteed.

The invention discloses an electroosmosis electrode and an electroosmosis draining system thereof, which comprise sectional draining electrode pipes, conductive filter cloth, a programmable direct current power supply, a draining pipe, a timing controller, a cable, a vacuum pump, a region optimizing device and a seismic wave real-time monitoring alarm, wherein the sectional draining electrode pipes are in thread connection by soft conductive connectors, are wrapped by the conductive filter cloth on the outside, meet the requirements of construction environments on mechanical properties and corrosion resistant property, and can still be used for a long time after multiple times of earthquakes and electroosmosis, and the use efficiency of electroosmosis equipment during soft base treatment can be improved by the uninterruptible electrifying of an electroosmosis instrument, thus reducing the construction cost. Excess pore water pressure generated by earthquake action can be timely discharged from a draining channel by the electroosmosis and vacuum negative actions, thus avoiding the shock damage to upper-part soil body and the earthquake liquefaction of a liquefied soil layer caused by the excess pore water pressure. The electroosmosis electrode and the electroosmosis draining system thereof are simple in structure, convenient to construct, durable and practical, and provides technical support and guarantee for promotion and application of an electroosmosis method on the fields such as soft base reinforcing and earthquake fortification of buildings.

A lyophilized polynucleotide composition contains at least one polynucleotide and at least one cryoprotectant, wherein the ratio of the polynucleotide to cryoprotectant is from about 0.001 to about 1.0 part by weight polynucleotide per 1.0 part by weight of the cryoprotectant. This composition also contains from about 0.5 weight percent to about (6) weight percent water, based on the total weight of the final lyophilized polynucleotide composition. The polynucleotide composition of this invention is characterized by enhanced stability, in that it retains at least 90% supercoil over a time period of at least (10) days at a temperature of about 37° C. The lyophilized polynucleotide composition also has improved solubility. An improved process for lyophilization of polynucleotides employs a specific primary drying cycle, that results in the above-described stable, lyophilized polynucleotide composition.

The invention discloses a foundation treatment method adopting a water penetration pile in combination with vacuum preloading. The foundation treatment method comprises the following steps: (1) fabricating the water penetration pile, wherein a pile body of the water penetration pile is a hollow tubular pile and provided with a pile cap; (2) blocking a treatment area of a foundation, forming a zone with a plurality of adjacent single blocks, carrying out synchronous construction on all the blocks during vacuum preloading, and carrying out a flow process between the zones; (3) driving the prefabricated water penetration pile in the foundation in a preloading zone, and fully spreading a sand cushion in a preloading area; (4) laying a vacuum pipe network; (5) paving a sealing film on the surface of the flattened sand cushion for a plurality of times; (6) digging out a seal trench in the periphery of an reinforcement zone, and vertically inserting the edge of the sealing film into weak soil along the inner wall of the seal trench and paving the film at the bottom of the trench flatly; and (7) carrying out vacuumizing and tightening the pile cap. As the water penetration pile is high in rigidity and strength, and good in water penetration performance, the pore water pressure and the settlement respectively accumulated in the foundation treatment process are low, and correspondingly, the post-construction settlement of the foundation is reduced; the bearing strength of the foundation is also improved.

An engine includes a pre-chamber jet igniter which injects at least one jet combustion flame into the combustion chamber from the outside of the combustion chamber in which the piston reciprocates to generate power so that the injected jet combustion flame is utilized as the source of ignition of the fuel injected into the space in the combustion chamber to drive the explosion stroke such that combustion of the combustion chamber can be maintained reliable by the use of jet combustion flames in the form of large flame kernels, fuel consumption can be remarkably improved and the generation of NOx can be remarkably reduced using rapid cold combustion which is caused by the continuously reliable combustion, and, in particular, it is possible to prevent liquefaction of the air-fuel mixture due to variations in the flow and pressure of the air-fuel mixture flowing in the combustion chamber.

A three-dimensional experimental device for simulating lithologic reservoir forming, which comprises an experiment body, a fluid injecting system, an extrusion system, a backpressure system, a thermotank and a data acquisition and control system, wherein the experiment body comprises a box body with a solid chamber and a piston fitted in the solid chamber; the box body is provided with a fluid filler port and a fluid discharge port; the fluid injecting system comprises a high pressure pump and first intermediate containers communicated with the high pressure pump; the first intermediate containers are communicated with the fluid filler port of the experiment body; the extrusion system pushes the piston to move downward in the box body; the backpressure system is communicated with the fluid discharge port of the experiment body; the thermotank is used for accommodating the experiment body and the first intermediate containers of the fluid injecting system; and the data acquisition and control system comprises a plurality of electrodes, a pressure sensor, a temperature measurer and an industrial computer. The three-dimensional experimental device has high degree of automation, can three-dimensionally acquire parameters in the process of oil-water migration and accumulation, instantly analyze the route of the oil migration and the position of the oil accumulation and really simulate the forming process of the lithologic reservoirs at higher temperature and higher pressure underground.

The invention relates to a construction method suitable for making a shield penetrate through a building in a close range on a liquefied sandy soil stratum. The construction method comprises the steps that before construction, the geology and environment of a construction range are surveyed, and survey data are obtained; construction technical measures in the construction process are designed according to the survey data; the monitoring frequency is increased when the shield penetrates through the building, and construction parameters in the construction technical measures are dynamically adjusted according to monitored monitoring data; during pushing construction of the shield, pipe sections 8-10 rings away from the shield tail after being detached from the shield tail are subjected to micro-disturbance grouting, and the grouting pressure is controlled to be smaller than or equal to 0.3 Mpa; and after construction is finished, the disturbance condition of a construction tunnel is predicted, and corresponding control measured are set out. According to the construction for making the shield penetrate through the building in a close range on the liquefied soil stratum, a micro-disturbance construction control technique is adopted, the situation that liquefied sandy soil is liquefied due to disturbance in the shield pushing process can be avoided, settlement is effectively controlled, and the building safety is guaranteed.

A method of preventing seismic liquefaction of the ground in an urban area built on reclaimed land consisting of a loose fine grained layer vulnerable to liquefaction underlain with a soft cohesive layer liable to uneven settlement comprising pumping out pore water from the loose fine grained layer to lower the groundwater table to the bottom level of that layer, then injecting into the loose fine grained layer tap water saturated with air and containing micro particles of fly ash or another mineral serving as vehicles of the air into the loose fine grained layer so as to form countless tiny air bubbles and thereby reduce the degree of saturation of that layer to a level preventing seismic liquefaction.

The invention discloses a method for recycling waste gas of a butadiene extracting device, which comprises: (1) a step of boosting, which is to allow liquid-phase C4 with a relatively high pressure and the waste gas with a relatively low pressure to enter the injector, mix the waste gas and the liquid-phase C4 at the outlet of the injector to form a gas-liquid phase material flow, and cool the material flow to obtain the liquid-phase blended C4 material flow; and (2) a step of hydrogenization, which is to mix the blended C4 material flow obtained by the step (1) and circular alkane from hydrogenization products, boost with a booster pump, introduce hydrogen gas into the hydrogenization reactor, cool the products discharged from the outlet of the hydrogenization reactor to room temperature, and separate the products into two flows, wherein one flow serving as the circular alkane is introduced to the inlet of the hydrogenization reactor, and the other is used as the alkane product. The method can reduce the inactivation of catalyst in the hydronization process, saves energy and improves the comprehensive utilization rate of C4.

The invention discloses an anti-liquefaction three-dimensional drainage rigid pile and a construction method thereof. Multiple grooves are vertically formed in the side surface of the rigid pile; vertical drainage bodies are arranged in the grooves; multiple grooves are transversely formed in the side surface of the rigid pile; transverse drainage bodies are arranged in the grooves; the depths of the vertical grooves and the vertical drainage bodies can reach the bottom of a liquefied soil layer; and the transverse grooves and the transverse drainage bodies are arranged on a pile body in a range of the liquefied soil layer. The vertical drainage bodies and the transverse drainage bodies are fixed in the grooves; and layers of steel wire meshes cover the surfaces of the drainage bodies.

The invention discloses a construction method for preventing deformation of a utility tunnel at a high-water-level liquefaction region. The construction method comprises the following steps: arranging enclosure bodies on the two sides of a foundation pit to be excavated; excavating the foundation pit; laying horizontal gravel drainage passages at the bottom of the foundation pit in layers; pouring a bottom plate and wall plates on the two sides of the bottom plate of the utility tunnel on the horizontal gravel drainage passages in sequence; refilling covering soil between the wall plates and the enclosure bodies in layers; meanwhile refilling vertical gravel drainage passages along the wall plates; pouring a roof plate of the utility tunnel after refilling the covering soil and the vertical drainage passages to the position of the roof plate of the utility tunnel; refilling the covering soil on the top of the utility tunnel and refilling the vertical gravel drainage passages to the design ground. The construction method has the advantages that the construction steps are simple and a complex structure consisting of the foundation pit enclosure bodies, the gravel drainage passages and shear connectors is used for achieving the purposes of inhibiting the foundation liquefaction, quickening the drainage of the liquefied foundation and preventing the deformation of the utility tunnel due to floating.

The invention relates to a sulfur hexafluoride high-voltage circuit breaker. The sulfur hexafluoride high-voltage circuit breaker for a cold region comprises a device body of the high-voltage circuit breaker. A sulfur hexafluoride gas chamber, a density relay and a transmission mechanism are arranged inside the device body. Sulfur hexafluoride gas is filled inside the sulfur hexafluoride gas chamber, the high-voltage circuit breaker further comprises a sulfur hexafluoride gas liquefying prevention device. The sulfur hexafluoride gas liquefying prevention device comprises a gas storage tank filled with the sulfur hexafluoride gas and a connecting pipe. One end of the connecting pipe is connected on a gas compensation port or a special connecting port of a high-voltage circuit breaker body in a sealing mode, and the other end of the connecting pipe is connected on the gas storage tank to enable the inside of the gas storage tank and the sulfur hexafluoride gas chamber to be mutually communicated, and a thermal insulating layer is arranged outside the gas storage tank. The sulfur hexafluoride high-voltage circuit breaker can prevent the sulfur hexafluoride gas from being liquefied or liquefied too much, and the safe operation of the sulfur hexafluoride high-voltage circuit breaker in cold weather can be guaranteed.

A method of preventing seismic liquefaction of the ground in an urban area built on reclaimed land consisting of a loose fine grained layer vulnerable to liquefaction underlain with a soft cohesive layer liable to uneven settlement comprising pumping out pore water from the loose fine grained layer to lower the groundwater table to the bottom level of that layer, then injecting into the loose fine grained layer tap water saturated with air and containing micro particles of fly ash or another mineral serving as vehicles of the air into the loose fine grained layer so as to form countless tiny air bubbles and thereby reduce the degree of saturation of that layer to a level preventing seismic liquefaction.

A spindle device of a machine tool capable of preventing coolant mist from being excessively liquefied in an area between a mist outlet member 23 and near the rear end part of a tool 29, wherein a straight feed pipe 14 formed of a double tube having an inside tube 14a and an outside tube 14b is inserted into an inside hole formed at the center part of a spindle 2 in non-rotating state not coming into contact with the spindle, coolant is fed to the inside tube 14a, compressed air is fed to the outside tube 14b, and a mist generating member 16 is formed of both tubes near the inside tip part of the spindle, a mist outlet member 23 is installed into the outside tube 14b integrally with each on the mist outlet passage c of the mist generating member 16 so as to surround the mist outlet passage and a mist guiding extension member 24 allowed to reach near the rear end part of the tool in the center hole of the tool holder is installed, integrally with the spindle, on the other tool holder 8 side, and the mist guiding passage f of the mist guiding extension member 24 is allowed to communicate with the mist outlet passage c of the mist outlet member 23 through both a rotary joint 25 and a pressing tube member 27.

The invention relates to a method and a device for the desulphurization of recycle hydrogen. The invention provides a method for the desulphurization of the recycle hydrogen, which comprises the following steps: conveying the recycle hydrogen mixture into a high-pressure separator of an internal cyclone separator to remove liquid and solid particles carried by the mixture; and delivering the recycle hydrogen mixture from which the liquid and the solid particles are removed into a desulfurizer to remove sulfur carried by the mixture, wherein the high-pressure separator and the desulfurizer are transversely arranged or longitudinally and coaxially overlapped. The invention also provides a device for the desulphurization of the recycle hydrogen.

The invention discloses an air conditioner control method. The air conditioner control method includes the following steps of detecting indoor environmental humidity and environmental temperature; obtaining corresponding condensation temperature difference according to the environmental humidity and the environmental temperature; when the absolute value of the difference between the air supply temperature and the environmental temperature is greater than or equal to the condensation temperature difference, adjusting the air supply temperature of an air conditioner to enable the absolute value of the difference between the air supply temperature and the environmental temperature to be less than the condensation temperature difference, thereby avoiding the generation of condensation; and specifically, the air supply temperature is between a set temperature of the air conditioner and the environmental temperature. The invention further discloses the air conditioner, and a computer readable storage medium. According to the air conditioner control method, the generation of the condensation is avoided, and the reliability of the air conditioner adjusting the indoor environment is improved.

The invention discloses a compression-ejection compound refrigerating system using a Knudsen compressor. The compression-ejection compound refrigerating system comprises a residual or waste heat exchanger, a first ejector, a second ejector, a condenser, a first heat regenerator, a first throttling valve, an evaporation condenser, a first Knudsen compressor, a second Knudsen compressor, a second heat regenerator, an evaporator and a second throttling valve; the system is divided into a compression refrigerating part and an ejection refrigerating part which are connected with each other through a common evaporation condenser and the evaporator; the ejectors are driven by the residual or waste heat; the two Knudsen compressors are driven by the residual or waste heat or the solar energy; the overall system is excellent in energy conservation and environmental protection performance; the system is free of motion part and free of lubrication oil; due to the arrangement of the two heat regenerators, the superheat degrees of refrigerants entering the Knudsen compressors can be respectively increased; the phenomenon that the refrigerants are liquefied in the Knudsen compressors can be avoided; super-cooled refrigerants for compression refrigeration and ejection refrigeration are combined and flow into the evaporator, so that the efficiency of the overall system is improved.

Multi-type air conditioner including an outdoor unit having a compressor, an outdoor heat exchanger, a flow path control valve for controlling a flow path of the refrigerant from the compressor, and an outdoor unit piping system, a plurality of indoor units each having an indoor expansion device, an indoor heat exchanger, and an indoor piping system, a distributor for selectively distributing the refrigerant from the outdoor unit to the indoor units and returning to the outdoor unit again proper to respective operation modes, and noise preventing means on pipelines respectively connected to the indoor units to cut off refrigerant flow into inoperative indoor units when the air conditioner is in operation, for preventing occurrence of refrigerant flow noise at the inoperative indoor units.

The invention discloses a chitosan-nano laponite composite gel wound dressing and a preparation method thereof. The chitosan-nano laponite composite gel wound dressing is prepared from the following raw materials in parts by weight: 1 to 16 parts of chitosan, 0.6 to 20 parts of nano laponite, 0.1 to 0.5 part of sodium pyrophosphate, 1.2 to 3.5 parts of plasticizer, 8.5 to 20 parts of moisturizing agent, and 67 to 85 parts of water. The gel wound dressing is simple in preparation process and low in production cost; and by combining the chitosan and nontoxic nano laponite, the product has good biological compatibility, antibacteria and hemostasia performance and moisturizing performance, can effectively prevent the fat liquefaction of a wound, can promote the rapid healing of the wound, and has remarkable nursing effect for the wound that is difficult to heal or the scald wound.

The invention relates to a recycling processing intelligent robot for a waste and old aluminum coil of a cable, and the robot comprises a bottom plate, wherein the upper end of the bottom plate is sequentially provided with a heating device, a rubbing and kneading skin-cutting device, a separation device and a coiling device. The robot can solve problems that an aluminum coil needs to be heated inthe in the conventional manual processing process of the surface insulator of the waste and old aluminum coil, the surface insulator of the aluminum coil needs to be peeled off manually, the manual rubbing and kneading operations of the surface insulator of the aluminum coil are complex, the pungent smell emitted by the heated aluminum coil insulator affects the health of a worker, the manual peeling of the insulator on the aluminum is not completed, and the manual processing of the surface insulator of the aluminum coil is large in labor intensity, is large in time waste and is low in work efficiency. The device can achieve the high-efficiency recycling of the surface insulator of the waste and old aluminum coil.

An object of the invention is to provide a substrate treatment device that can lengthen the maintenance cycle, and prevent any by-product from falling on substrates even if it is accumulated, and a manufacturing method of such a substrate treatment device, and an embodiment of the invention is directed, comprising: a treatment chamber that subjects a substrate to a treatment while keeping hold of it by a substrate retention member; a reaction tube that configures the treatment chamber; a heating device that is disposed around the reaction tube for heating the treatment chamber; and an exhaust tube that is linked to the reaction tube on an upper side than the substrate inside of the treatment chamber and is extended downward from the heating device, and exhausts a gas inside of the reaction tube in which an extension portion as a result of the extension is disposed away from the reaction tube.

A dry etching method according to the present invention is for etching a silicon layer as a processing target in a processing room, characterized by supplying an iodine heptafluoride-containing etching gas from a gas supply source at a supply pressure of 66 kPa to 0.5 MPa, evacuating the processing room to an internal pressure lower than the supply pressure of the etching gas and, while maintaining the etching gas at the supply pressure, introducing the etching gas into the evacuated processing room so as to etch the silicon layer by the etching gas. It is possible by this dry etching method to etch the silicon upon adiabatic expansion of the etching gas under mild pressure conditions, with no fear of equipment load and equipment cost increase, and achieve good uniformity of in-plane etching amount distribution.

The invention discloses a gravel pile and plain concrete pile combined composite foundation. Gravel piles and plain concrete piles are alternately arranged in a field needing to be treated, gravel cushion layers are paved at the tops of the piles, and the length ratio of the gravel piles to the plain concrete pile is 1:2. The gravel piles can effectively compact earth among the piles to solve the problem of uncompleted concretion of new fill stratums and can form drainage channels to achieve the effects of replacing and forming the drainage channels, and meanwhile, foundation liquefaction can be further eliminated by compaction vibration during construction of the gravel piles. The gravel piles, the plain concrete piles and an original natural foundation jointly form the combined composite foundation, and effects of compacting soil mass, replacing and forming the drainage channels, eliminating liquefaction and benefiting soil mass concretion are achieved while bearing capacity can be greatly improved and soil compressibility of the foundation is lowered. The gravel piles and the plain concrete piles are combined, disadvantages are avoided while advantages are complemented, treatment effects are guaranteed while the requirements of a superstructure are met, and effects of capital saving and project period shortening are further achieved.

The invention relates to a sulfur hexafluoride high-voltage circuit breaker. The sulfur hexafluoride high-voltage circuit breaker used in cold regions comprises a high-voltage circuit breaker equipment body. A sulfur hexafluoride gas chamber, a density relay and a transmission mechanism are arranged in the equipment body. The sulfur hexafluoride gas chamber is filled with sulfur hexafluoride gas. The high-voltage circuit breaker further comprises sulfur hexafluoride gas liquefaction prevention plant. The sulfur hexafluoride gas liquefaction prevention plant comprises a gas storage tank filled with the sulfur hexafluoride gas and a connecting pipe. One end of the the connecting pipe is connected onto a gas supplement port or a dedicated connection port of the high-voltage circuit breaker body in a sealing manner, and the other end of the connecting pipe is connected onto the gas storage tank to communicate the gas storage tank and the sulfur hexafluoride gas chamber. A heat insulating layer is arranged outside the gas storage tank. The sulfur hexafluoride high-voltage circuit breaker of the invention can be used to prevent the liquidation or excessive liquidation of the sulfur hexafluoride gas so as to ensure the safe operation of the sulfur hexafluoride high-voltage circuit breaker in cold weather.

The invention relates to the technical field of intelligent security and protection. The invention further discloses heat energy recovery demisting type intelligent security and protection monitoringequipment based on curved bar ventilation. The device comprises a mounting base, a machine shell is arranged at the top of the mounting base, limiting plugs are arranged on the upper surface of the mounting base and located on the outer walls of the left side and the right side of the machine shell, an exhaust hole is formed in the middle of the right side wall of the machine shell, and a motor isfixedly installed on the upper side wall in the machine shell. The invention discloses heat energy recovery demisting type intelligent security monitoring equipment based on curved bar ventilation. Air in the left side of the ventilation shell is compressed to the right side through the ventilation plate; the air in the left chamber of the air exchange shell is exhausted to the exhaust hole through the air guide pipe, at the moment, the pressure intensity of air in the left chamber of the air exchange shell is smaller than that of outside air, so that air is exhausted through the air suctionhead, the air exchange plate swings periodically, damp air in the anti-fog cover can be exhausted, and the phenomenon that the air in the anti-fog cover humidifies the surface of the camera to cause unclear shooting is prevented.

The invention provides organic solvent dehydration equipment of a pervaporation membrane. The equipment comprises a feedstock pump, a preheater, an evaporator, a tail pump, a gas-liquid separator, a superheater, a dehydration device, a penetrating fluid receiving tank, a vacuum unit, a finished product condenser and a finished product tank. According to the equipment, as a dehydration system of a comprehensive membrane is adopted, the quality requirements which cannot be achieved by the traditional method are overcome, and the comprehensive utilization benefit is improved; the tail pump can be used for continuously and quantitatively discharge pollution; the gas-liquid separator can achieve the reduction of entrainment of the evaporator; the heat loss of airflow is compensated by the superheater, so that the temperature of feedstock is guaranteed; the preheater can achieve the reduction of energy consumption by utilizing heat exchange between product steam and feedstock; a membrane component adopts a jacket structure, so that materials are prevented from being liquefied; the feedstock is provided with an online monitor, so that the physical property of a membrane feeding material is ensured to be qualified; produced penetrating fluid is recycled to a distillation column again, and residues are recycled, so that energy is saved, emission is reduced, and the equipment is beneficial to environmental protection.

A substrate processing apparatus that can reduce the number of parts. A first gas introduction hole through which the hydrogen fluoride gas is introduced into a GDP is formed in an upper lid. A second gas introduction hole through which hydrogen fluoride gas is introduced from a hydrogen fluoride gas source is formed in a processing vessel. When the upper lid engages the upper portion of the processing vessel, one end of the first gas introduction hole is joined with one end of the second gas introduction hole to form an introduction path through which the hydrogen fluoride gas is introduced into a chamber.