The invention discloses a miniaturized high-flow high-pressure high-
dew-point saturated gas generating device which comprises a
mass flow controller, a first
pressure controller, a pre-saturator, a gas inlet pipeline, a saturator, a second
pressure controller, a water
inlet valve, a water return valve, a constant-temperature water tank and a circulating water path, the
mass flow controller controls the flow of input unsaturated gas and is connected with the pre-saturator through the first
pressure controller, the pre-saturator is used for generating supersaturated
moisture, the saturator is connected with the pre-saturator through a gas inlet pipeline, the supersaturated
moisture generated by the pre-saturator is condensed, saturated
moisture is output, and the saturated moisture is stored in the pre-saturator. The second pressure controller is connected with the saturator, the air outlet pressure of the saturator is controlled by controlling the outlet pressure, the constant-temperature water tank generates circulating water with constant and adjustable temperature, and the circulating water path conveys the circulating water generated by the constant-temperature water tank to the saturator to provide a constant-temperature environment for the saturator. High-flow, high-pressure, high-
dew-point and high-stability saturated moisture generation can be realized.