The invention discloses a liquid-phase
plasma processing device and method based on a floating
discharge tool. The floating tool is made of a flexible conductive material and is electrically connected with an adjustable
voltage source through a conductive bearing. A workpiece to be machined is fixed on the workpiece base, and then the adjustable
voltage source is grounded, so that a loop is formed between the floating
discharge tool and the workpiece. The floating
discharge tool elastically deforms and retreats through fluid
dynamic pressure generated by rotation of the main shaft, the position of the air floating guide rail is dynamically adjusted, the thickness of a liquid film is kept unchanged, and stable
material removal with sub-nanometer precision is achieved. Then an adjustable
voltage source is used for enabling a floating discharge tool to conduct confinement
plasma discharge in a liquid film gap, the synergistic effect of catalytic nano-particles in the
polishing solution is stimulated along with the action of a photoelectric field generated through discharge, strong-oxidizing-property free radical groups are generated, atoms on the surface of a workpiece are subjected to confinement oxidation, the
material hardness is reduced, and the
material removal rate is increased; therefore, the method has the capabilities of efficient
processing and sub-nanometer
surface shape precision control.