30 results about "Prism coupler" patented technology

A wafer-level testing arrangement for opto-electronic devices formed in a silicon-on-insulator (SOI) wafer structure utilizes a single opto-electronic testing element to perform both optical and electrical testing. Beam steering optics may be formed on the testing element and used to facilitate the coupling between optical probe signals and optical coupling elements (e.g., prism couplers, gratings) formed on the top surface of the SOI structure. The optical test signals are thereafter directed into optical waveguides formed in the top layer of the SOI structure. The opto-electronic testing element also comprises a plurality of electrical test pins that are positioned to contact a plurality of bondpad test sites on the opto-electronic device and perform electrical testing operations. The optical test signal results may be converted into electrical representations within the SOI structure and thus returned to the testing element as electrical signals.

A coupling arrangement for allowing multiple wavelengths to be coupled into and out of a relatively thin silicon optical waveguide layer utilizes a diffractive optical element, in the form of a volume phase grating, in combination with a prism coupling structure. The diffractive optical element is formed to comprise a predetermined modulation index sufficient to diffract the various wavelengths through angles associated with improving the coupling efficiency of each wavelength into the silicon waveguide. The diffractive optical element may be formed as a separate element, or formed as an integral part of the coupling facet of the prism coupler.

An arrangement for achieving and maintaining high efficiency coupling of light between a multi-wavelength optical signal and a relatively thin (e.g., sub-micron) silicon optical waveguide uses a prism coupler in association with an evanescent coupling layer. A grating structure having a period less than the wavelengths of transmission is formed in the coupling region (either formed in the silicon waveguide, evanescent coupling layer, prism coupler, or any combination thereof) so as to increase the effective refractive index “seen” by the multi-wavelength optical signal in the area where the beam exiting / entering the prism coupler intercepts the waveguide surface (referred to as the “prism coupling surface”). The period and / or duty cycle of the grating can be controlled to modify the effective refractive index profile in the direction away from the coupling region so as to reduce the effective refractive index from the relatively high value useful in multi-wavelength coupling to the lower value associated with maintaining confinement of the optical signals within the surface waveguide structure, thus reducing reflections along the transition region.

An SOI-based opto-electronic structure includes various electronic components disposed with their associated optical components within a single SOI layer, forming a monolithic arrangement. EMI / EMC shielding is provided by forming a metallized outer layer on the surface of an external prism coupler that interfaces with the SOI layer, the metallized layer including transparent apertures to allow an optical signal to be coupled into and out of the SOI layer. The opposing surface of the prism coupler may also be coated with a metallic material to provide additional shielding. Further, metallic shielding plates may be formed on the SOI structure itself, overlying the locations of EMI-sensitive electronics. All of these metallic layers are ultimately coupled to an external ground plane to isolate the structure and provide the necessary shielding.

A trapezoidal shaped single-crystal silicon prism is formed and permanently attached to an SOI wafer, or any structure including a silicon optical waveguide. In order to provide efficient optical coupling, the dopant species and concentration within the silicon waveguide is chosen such that the refractive index of the silicon waveguide is slightly less than that of the prism coupler (refractive index of silicon≈3.5). An intermediate evanescent coupling layer, disposed between the waveguide and the prism coupler, comprises a refractive index less than both the prism and the waveguide. In one embodiment, the evanescent coupling layer comprises a constant thickness. In an alternative embodiment, the evanescent coupling layer may be tapered to improve coupling efficiency between the prism and the waveguide. Methods of making the coupling arrangement are also disclosed.

An arrangement for achieving and maintaining high efficiency coupling of light between a multi-wavelength optical signal and a relatively thin (e.g., sub-micron) silicon optical waveguide uses a prism coupler in association with an evanescent coupling layer. A grating structure having a period less than the wavelengths of transmission is formed in the coupling region (either formed in the silicon waveguide, evanescent coupling layer, prism coupler, or any combination thereof) so as to increase the effective refractive index “seen” by the multi-wavelength optical signal in the area where the beam exiting / entering the prism coupler intercepts the waveguide surface (referred to as the “prism coupling surface”). The period and / or duty cycle of the grating can be controlled to modify the effective refractive index profile in the direction away from the coupling region so as to reduce the effective refractive index from the relatively high value useful in multi-wavelength coupling to the lower value associated with maintaining confinement of the optical signals within the surface waveguide structure, thus reducing reflections along the transition region.

An optical coupler for parallel coupling from a single mode optical fiber, or fiber ribbon, into a silicon-on-insulator (SOI) waveguide for integration with silicon optoelectronic circuits. The optical coupler incorporates the advantages of the vertically tapered waveguides and prism couplers, yet offers the flexibility of planar integration. The optical coupler may be fabricated using wafer polishing technology or grayscale photolithography. The optical coupler can be packaged using epoxy bonding to form a fiber-waveguide parallel coupler or connector.

The invention provides a prism-grating optical waveguide coupler and an optical waveguide device with the optical waveguide coupler. The optical waveguide coupler comprises a prism, a grating and a mode convertor, wherein the grating and the mode converter are manufactured on a plane waveguide. Incident light in free space can be coupled to the plane waveguide and converted to be in the ridge type waveguide mode. The prism is a discrete component, and an air gap is reserved between the prism and the grating so that total emission of the incident light in the free space can be achieved on the bottom face of the prism to generate an evanescent field. The grating is manufactured on the plane waveguide, disturbance is caused to the evanescent field through diffraction, and therefore optical energy is coupled in the plane waveguide. The mode convertor is provided with a ridge-shaped portion gradually narrowing down so that the coupled waveguide mode can be converted into a waveguide mode in a ridge-shaped waveguide. The optical waveguide coupler can effectively couple the light in the free space to the waveguide with the high refractive index such as the SOI, the problems of coupling of the ridge type waveguide and mode conversion are effectively solved, and the optical waveguide coupler has the advantages of both a prism coupler and a grating coupler, and is wide in application range, easy to manufacture and convenient to machine.

The invention relates to a prism-coupled SPR biosensor, which comprises an optical plastic prism, an inner metal film layer, an outer metal film layer and a biological component layer; The outer metal film layer is deposited on the film layer, the inner metal film layer and the outer metal film layer can be two kinds of the same or different metal film layers, and the sum of the thickness of the inner metal film layer and the outer metal film layer is between 20-80nm The space meets the optical requirements for exciting surface plasmon resonance, and a biological component layer is fixed on the surface of the outer metal film layer. The present invention also relates to the use of the prism-coupled SPR biosensor in preparing biochips and its use in detecting interactions between biological samples.

An optical coupler for parallel coupling from a single mode optical fiber, or fiber ribbon, into a silicon-on-insulator (SOI) waveguide for integration with silicon optoelectronic circuits. The optical coupler incorporates the advantages of the vertically tapered waveguides and prism couplers, yet offers the flexibility of planar integration. The optical coupler may be fabricated using wafer polishing technology or grayscale photolithography. The optical coupler can be packaged using epoxy bonding to form a fiber-waveguide parallel coupler or connector.

The invention discloses a ghSPR sensor for detection of refractive index and a detection method thereof. The ghSPR sensor comprises a laser, a polarization splitting prism, a beam splitter prism, a light chopper, reflectors, a SPR sensing prism and a displacement detector. After light emitted from the laser is vertically incident upon the polarization splitting prism, the light is divided into p polarized light and s polarized light. The p light successively passes through the light chopper and the beam splitter prism, and then reaches the SPR sensing prism. The s light successively passes through a reflector A, the light chopper, a reflector B and the beam splitter prism, and then reaches the SPR sensing prism. The back of the SPR sensing prism is coupled with a microfluidic chip by the use of a refractive index matching fluid, and laser reaches the displacement detector after being reflected from a gold film at the back of the prism. The ghSPR sensor of the invention has characteristics of simple structure, good stability and high sensitivity.

A wafer-level testing arrangement for opto-electronic devices formed in a silicon-on-insulator (SOI) wafer structure utilizes a single opto-electronic testing element to perform both optical and electrical testing. Beam steering optics may be formed on the testing element and used to facilitate the coupling between optical probe signals and optical coupling elements (e.g., prism couplers, gratings) formed on the top surface of the SOI structure. The optical test signals are thereafter directed into optical waveguides formed in the top layer of the SOI structure. The optoelectronic testing element also comprises a plurality of electrical test pins that are positioned to contact a plurality of bondpad test sites on the opto-electronic device and perform electrical testing operations. The optical test signal results may be converted into electrical representations within the SOI structure and thus returned to the testing element as electrical signals.

An image display system with reflection-type light valve is composed of a prism module with two external surfaces, a side surface and two adjacent tanget surfaces between two external surfaces, a polarizer with metallic wire grid, a reflection-type light valve, and a lens set. When a light beam with a single polarity is irradating into said prism module and then fully reflected, polarized, offset, and projected to lens set to form an image. Its advantages are no polarization loss, and high constract.

The invention provides a folding extension display optical device based on prism coupling. The folding extension display optical device comprises a display light source, a collimating lens, a coupling prism, an optical wave coupling input component, an optical wave folding transmission waveguide, an optical wave coupling output component and an optical wave unfolding component, wherein the display light source is used for emitting display optical waves for displaying the needed image; the collimating lens is used for collimating the optical waves emitted by the light source; the coupling prism is used for changing the propagation direction of collimated optical waves; the coupling input component is used for coupling inputting an outside optical signal into a substrate; a folding transmission substrate is used for performing reflection propagation on the coupled and input optical waves so as to reach an output position; the coupling output component is used for coupling and outputting the optical waves from the substrate; and the optical wave unfolding component is used for performing beam expansion on the coupled and output optical waves. The folding extension display optical device disclosed by the invention has the characteristics of compact structure, flexibility, large view field, light weight and the like and can be applied to the fields of wearable display, uniform illumination and mobile display.

The invention relates to an optical waveguide parameter testing clamp which comprises a base, an optical waveguide clamp, a longitudinal guiderail, a set of fixed transverse guiderails, an input prism clamp, a set or multiple sets of slide transverse guiderails and an output prism clamp. The fixed transverse guiderails, the longitudinal guiderails and the optical waveguide clamp are mounted on the base. The slide transverse guiderails are mounted on the longitudinal guiderail. The input prism clamp is mounted on the fixed transverse guiderails. The output prism clamp is mounted on the slide transverse guiderails. The optical waveguide clamp is located at the position close to the tail ends of the fixed transverse guiderails and the slide transverses guiderails. The output prism clamp can be replaced by a CCD camera. The optical waveguide parameter testing clamp can be used for clamping prism couplers, to-be-tested waveguides, detectors and the like. In addition, the optical waveguide parameter testing clamp is applicable to various waveguide parameter measuring methods, novel and simple in structure, high in testing precision, good in repeatability, convenient to operate, wide in application range, and the like.

The invention discloses a prism laser-enhanced coating device, which comprises a fixed platform, a mobile platform, two first branch chains, a second branch chain, a laser module and a prism module, wherein fixed ends of the first branch chains and the second branch chain are connected to the fixed platform; output ends of the first branch chains and the second branch chain are connected to the mobile platform; the fixed platform is fixedly arranged; and the laser module and the prism module are arranged at the lower part of the mobile platform. By adopting a symmetrical structural design, the prism laser-enhanced coating device is flexible in motion and high in carrying capacity, has the advantages of being simple and compact in structure, reasonable in design and good in processing and assembling processes, so that large-range laser irradiation can be achieved by the mobile platform with a small dip angle, large-range workpiece surface coating is convenient to implement and surface laser-enhanced coating can be finally carried out a workpiece with spatial complicated curved surface characteristics.

The invention discloses a multi-pass prism coupler with an air interlayer. The multi-pass prism coupler comprises a grooving coupling prism, a nonlinear frequency conversion crystal and a heat dissipation metal sheet which are sequentially arranged in the light beam irradiation direction. The non-linear frequency conversion crystal is in a flat plate shape, and the grooving coupling prism and theheat dissipation metal sheet are arranged on the two opposite plate faces of the non-linear frequency conversion crystal respectively. Fundamental frequency light is coupled into the grooved couplingprism and propagates in the crystal at a phase matching angle, and the fundamental frequency light and harmonic waves generated by entering the crystal are coupled and output from the prism after being reflected back and forth on two opposite plate surfaces of the crystal for multiple times. According to the coupler provided by the embodiment of the invention, the incident light is reflected for multiple times in the nonlinear frequency conversion crystal by utilizing the total internal reflection angle, the effective length of the nonlinear frequency conversion crystal is multiplied, and theheat dissipation metal sheet is arranged on the plate surface of the nonlinear frequency conversion crystal, so that the heat accumulation effect of the bonding surface of the prism and the crystal can be effectively reduced; therefore, the overall damage threshold of the coupler is greatly improved, and the conversion efficiency and the output power of the frequency-doubled light are further improved.

The invention discloses a deep ultraviolet frequency comb generating device. The deep ultraviolet frequency comb generating device comprises a fundamental frequency optical comb light source 1, a frequency doubling crystal 2, a dispersion device 3, a quadruplicated frequency doubling prism coupling device 4, a dispersion compensator 5 and a beam shrinking device 6 which are sequentially arranged along an optical path. According to the device provided by the embodiment of the invention, the optical frequency comb wave band can be expanded to the deep ultraviolet wave band in a cascaded frequency multiplication mode, the frequency of the deep ultraviolet frequency comb is changed into four times of that of the fundamental frequency optical comb, the line width can be changed into half of that of the fundamental frequency, and the uncertainty can be reduced by about one magnitude theoretically, so that the measurement precision in precision measurement is improved.

The invention relates to a liquid refractive index sensing system based on a metal grating terahertz metasurface. The liquid refractive index sensing system comprises a high-resistance silicon prism coupling type metal grating terahertz metasurface sensing device and a post-processing system, wherein the high-resistance silicon prism coupling type metal grating terahertz metasurface sensing device is used for detecting the refractive index of liquid; and the post-processing system is used for visualizing and processing detected terahertz spectrum information in real time. According to the invention, a metal grating terahertz metasurface is used as a carrier, a high-momentum surface plasmon polariton (SPP) wave on the metal grating terahertz metasurface is excited through a high-resistance silicon prism coupler, and the sensing detection of the refractive index of a liquid sample to be detected in a groove in the surface of the metal grating is realized by using the extremely strong dielectric sensitivity of the SPP wave. Not only is the sensing sensitivity of the sensing system greatly improved, but also the strong absorption of the polar liquid to terahertz waves is relieved to the greatest extent, and effective sensing detection of the refractive index of a liquid sample is realized.

Prism coupling methods disclosed herein are directed to determining a stress characteristic of an original IOX article having a buried IOX region with a buried refractive index profile that is problematic in the sense that it prevents the original IOX article from being measured using a prism coupler system. The methods include modifying the buried IOX region of the original IOX article in a surface portion of the buried IOX region to form a modified IOX article having an unburied refractive index profile that allows the modified IOX article to be measured using a prism coupler. The methods also include measuring a mode spectrum of the modified IOX article using the prism coupler system. The methods further include determining one or more stress characteristic of the original IOX article from the mode spectrum of the modified IOX article.

The invention discloses a deep ultraviolet light frequency comb generating device. The deep ultraviolet light frequency comb generating device includes a fundamental frequency optical comb light source 1, a frequency doubling crystal 2, a dispersion device 3, and a frequency doubling prism coupled with a frequency doubling prism sequentially arranged along an optical path. Device 4, dispersion compensator 5 and beam reducer 6. The device provided by the embodiment of the present invention can extend the band of the optical frequency comb to the deep ultraviolet band through cascading frequency doubling, the frequency of the deep ultraviolet optical frequency comb becomes four times that of the fundamental frequency comb, and the line width can be changed to the fundamental frequency In theory, the uncertainty can be reduced by about one order of magnitude, thereby improving the measurement accuracy in precision measurement.

A wafer-level testing arrangement for opto-electronic devices formed in a silicon-on-insulator (SOI) wafer structure utilizes a single opto-electronic testing element to perform both optical and electrical testing. Beam steering optics may be formed on the testing element and used to facilitate the coupling between optical probe signals and optical coupling elements (e.g., prism couplers, gratings) formed on the top surface of the SOI structure. The optical test signals are thereafter directed into optical waveguides formed in the top layer of the SOI structure. The optoelectronic testing element also comprises a plurality of electrical test pins that are positioned to contact a plurality of bondpad test sites on the opto-electronic device and perform electrical testing operations. The optical test signal results may be converted into electrical representations within the SOI structure and thus returned to the testing element as electrical signals.

The invention provides a prism-grating optical waveguide coupler and an optical waveguide device with the optical waveguide coupler. The optical waveguide coupler comprises a prism, a grating and a mode convertor, wherein the grating and the mode converter are manufactured on a plane waveguide. Incident light in free space can be coupled to the plane waveguide and converted to be in the ridge type waveguide mode. The prism is a discrete component, and an air gap is reserved between the prism and the grating so that total emission of the incident light in the free space can be achieved on the bottom face of the prism to generate an evanescent field. The grating is manufactured on the plane waveguide, disturbance is caused to the evanescent field through diffraction, and therefore optical energy is coupled in the plane waveguide. The mode convertor is provided with a ridge-shaped portion gradually narrowing down so that the coupled waveguide mode can be converted into a waveguide mode in a ridge-shaped waveguide. The optical waveguide coupler can effectively couple the light in the free space to the waveguide with the high refractive index such as the SOI, the problems of coupling of the ridge type waveguide and mode conversion are effectively solved, and the optical waveguide coupler has the advantages of both a prism coupler and a grating coupler, and is wide in application range, easy to manufacture and convenient to machine.

A multi-pass prism coupler utilizing total dihedral angle, comprising a first coupling prism, a nonlinear frequency conversion crystal and a second coupling prism arranged in sequence along the light beam irradiation direction, the nonlinear frequency conversion crystal is flat, and the first coupling prism The prism and the second coupling prism are respectively arranged on two opposite board surfaces of the nonlinear frequency conversion crystal; After the multi-path total internal reflection is realized along the optical path between the two reflection areas, it is output through the first coupling prism or the second coupling prism. The coupler provided by the embodiment of the present invention utilizes the total internal dihedral angle to cause multiple reflections of the incident light in the nonlinear frequency conversion crystal, doubles the effective length of the frequency doubling crystal, and further improves the conversion efficiency and output power of the frequency doubling light.

A multi-pass prism coupler utilizing a total internal reflection angle comprises a first coupling prism, a non-linear frequency conversion crystal and a second coupling prism which are sequentially arranged in the light beam irradiation direction, the non-linear frequency conversion crystal is in a flat plate shape, and the first coupling prism and the second coupling prism are arranged in two opposite plate faces of the non-linear frequency conversion crystal respectively. The nonlinear frequency conversion crystal is used for propagating light beams entering the nonlinear frequency conversion crystal at a phase matching angle, realizing multi-pass total internal reflection between the first reflection region and the second reflection region along a light path, and outputting the light beams through the first coupling prism or the second coupling prism. According to the coupler provided by the embodiment of the invention, the incident light is reflected for multiple times in the nonlinear frequency conversion crystal by utilizing the total internal reflection angle, so that the effective length of the frequency doubling crystal is multiplied, and the conversion efficiency and theoutput power of the frequency doubling light are further improved.

The prism coupling methods disclosed herein are directed to determining a stress characteristic of an original IOX article having a buried IOX region with a buried refractive index profile that is problematic in the sense that it prevents the original IOX article from being measured using a prism coupler system. The methods include modifying the buried IOX region of the original IOX article in a surface portion of the buried IOX region to form a modified IOX article having an unburied refractive index profile that allows the modified IOX article to be measured using a prism coupler. The methods also include measuring a mode spectrum of the modified IOX article using the prism coupler system. The methods further include determining one or more stress characteristic of the original IOX article from the mode spectrum of the modified IOX article.