The application relates to a method for
electron microscopic analysis of
helium element distribution with nanoscale resolution, and belongs to the technical field of transmission
electron microscope microscopic analysis. The method for
electron microscopic analysis of
helium element distribution with nanoscale resolution comprises the following steps: pixel point scanning and collection are performed on a region where
helium bubbles of a sample to be measured are located, so that an
electron energy loss spectrum is obtained; an
electron energy loss spectrum
data set is obtained; background deduction is performed on the
electron energy loss spectrum
data set, so that a helium characteristic peak
signal spectrum line
data set is obtained; a distribution image of helium elements is obtained according to
total count intensities of helium characteristic peak signals of data points in the helium characteristic peak
signal spectrum line data set; and a distribution image of
helium atom density is obtained according to count intensities of data points in the helium characteristic peak
signal spectrum line data set within a preset energy range. The
analysis method provided by the application can not only realize microscopic analysis of the nanoscale resolution distribution of helium elements in materials, but also can distinguish the distribution difference of
helium atom density in different regions.