The invention relates to the technical field of filters, in particular to a
signal fuzzy control filter for a
wafer detection device. The
signal fuzzy control filter comprises a
wafer machine table, a detection module, a filter terminal and a controller. Due to the conditions of fragments and the like of the
wafer in the circulation process, the operation of a
machine table needs to be suspended for cleaning, and the application effect of the wafer detection device in production is influenced, so
phase angle analysis is carried out on
electric signal waveforms of wafer position information of the wafer detection device in different stations of a wafer
machine table through the arranged phase circuit and
clock circuit, and the
position error of each wafer in the wafer machine table is converted into the relative position difference between the circulating wafers in each
station; the
signal fuzzy control filter for the wafer detection device has a fuzzy
screening effect on the
electric signal data transmitted by the wafer detection device, and reduces the
processing capacity of a controller after the filter terminal processes the peak-valley value of the
electric signal waveform through the analysis of the waveform
phase angle, thereby improving the application effect of the signal fuzzy control filter for the wafer detection device.