35results about "Static energy spectrometers" patented technology

An instrument for analyzing ions includes at least one separation instrument configured to produce a flow of a sample solution in which molecules in the sample solution are separated as a function of at least one molecular characteristic, an ion source to generate ions from the sample solution flow, and an electrostatic linear ion trap (ELIT) to receive and trap ions exiting the at least one ion processing instrument. The ELIT is configured such that trapped ions oscillate back and forth through a charge detection cylinder between first and second ion mirrors at opposite ends of the cylinder with a duty cycle, corresponding to a ratio of time spent by the trapped ions traversing the charge detection cylinder and total time spent by the trapped ions traversing a combination of the first and second ion mirrors and the charge detection cylinder during one complete oscillation cycle, of approximately 50%.

A charge detection mass spectrometer may include an ion source to generate ions, a mass spectrometer to separate the generated ions as a function of ion mass-to-charge ratio to produce beam of separated ions, an electrostatic linear ion trap (ELIT) including a charge detection cylinder disposed between a pair of coaxially aligned ion mirrors, and means for controlling a trajectory of the beam of separated ions entering the ELIT to cause the ions subsequently trapped in the ELIT to oscillate therein with different planar ion oscillation trajectories angularly offset from one another about the longitudinal axis with each extending along and crossing the longitudinal axis in each of the ion mirrors or with different cylindrical ion oscillation trajectories radially offset from one another about the longitudinal axis to form nested cylindrical trajectories each extending along the longitudinal axis.

Provided is an electrostatic deflection convergence-type energy analyzer that has a wide acceptance angle and high two-dimensional convergence performance, is capable of imaging a two-dimensional real-space image and an emission angle distribution, and enables two-dimensional convergence and imaging at 90°deflection with respect to an incident direction. One or a plurality of outer electrodes and a plurality of inner electrodes are disposed along the shapes of two rotating bodies formed on the inside and the outside of a common rotating axis. The inner-surface shape of the outer electrode has a tapered shape becoming smaller in diameter toward both ends. The outer-surface shape of the inner electrodes has a tapered shape becoming smaller in diameter toward both ends. An electron incident hole and exit hole are formed in each of the outer electrodes at both ends on the rotating axis. The outer electrode and the inner electrodes have applied thereto voltages for accelerating and decelerating electrons in proportion to the energy of incident electrons. One or a plurality of electrodes except for the inner electrodes at both ends have applied thereto a voltage that is at least twice a converted acceleration voltage obtained by converting the energy of electrons into an acceleration voltage with reference to the potential of the outer electrode having the incident hole formed therein.

A low power mass spectrometer assembly includes at least an ionization component, an electrostatic analyzer, a lens assembly, a magnet assembly and at least one detector located in a same plane as the entrance to the magnet assembly for detecting the deflected sample ions and / or fragments of sample ions, including ions or ion fragments indicative of the Vitamin D metabolite within the sample.

The invention relates to providing a suitable interior space for near atmospheric pressure and vacuum pressure modes of operation of an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and near atmospheric pressure, the housing having an interior space that can be provided according to an operating mode of the material analysis system, the interior space being configured to receive charged particles released from a sample via an inlet opening at a distal end thereof. Furthermore, the inlet section has an interior space providing device configured to provide an interior space in a near atmospheric pressure operating mode such that a near atmospheric pressure is reduced from a distal end to a proximal end of the interior space to a vacuum pressure, an inner space is provided in a vacuum pressure operation mode; the inner space is configured such that a solid angle occupied by charged particles released from the sample extending into the inner space and a distance between the sample and a distal end of the inner space are greater in a vacuum pressure operating mode than in a near atmospheric pressure operating mode. This enables the inlet section to receive more electrons per unit time under different pressure environments of the inlet section and enables improved analysis of the sample.

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.

The present invention relates to providing an internal space suitable for a subatmospheric pressure mode of operation and a vacuum pressure mode of operation in an inlet section of a material analysis system. The inlet section has a housing configured for vacuum pressure and subatmospheric pressure, the housing having an internal space that can be provided depending on the operation mode of the material analysis system, the internal space being configured to receive charged particles emitted from a sample through an inlet opening at a distal end of the internal space. The inlet section further has an internal space providing device configured to provide the internal space such that, in the subatmospheric pressure mode of operation, the subatmospheric pressure is reduced to vacuum pressure between the distal end and the proximal end of the internal space, and to provide the internal space such that, in the vacuum pressure mode of operation, the solid angle extending within the internal space occupied by charged particles emitted from the sample in the vacuum pressure mode of operation and the distance between the sample and the distal end of the internal space are larger than in the subatmospheric pressure mode of operation. This allows the inlet section to receive more electrons per unit time when the pressure environments of the inlet section are different, enabling improved analysis of the sample.

A low power mass spectrometer assembly includes at least an ionization component, an electrostatic analyzer, a lens assembly, a magnet assembly and at least one detector located in a same plane as the entrance to the magnet assembly for detecting the deflected sample ions and / or fragments of sample ions, including ions or ion fragments indicative of the Vitamin D metabolite within the sample.

An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G0, a second conductive grid, G1, a third conductive grid, G2, a fourth conductive grid G3, and a collection electrode, C, each grid separated by an insulation layer, a battery power supply and control circuitry, integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser; wherein at least one insulation layer includes a peripheral portion which is of reduced thickness with respect to the remaining portion of the insulation layer.

The invention relates to the provision of a suitable interior for a near-atmospheric-pressure operating mode and a vacuum-pressure operating mode of an entrance portion of a material analysis system. The entrance portion comprises a housing which is designed for vacuum pressure and for near-atmospheric pressure and which has an interior that can be provided according to an operating mode of the material analysis system, which interior is designed to receive, at its distal end via an entrance opening, charged particles released by a sample. The entrance portion also comprises an interior-providing device which is designed to provide the interior in the near-atmospheric-pressure operating mode in such a way that a near-atmospheric pressure is reduced, from the distal end of the interior to the proximal end of the interior, to a vacuum pressure and to provide the interior in a vacuum-pressure operating mode in such a way that a solid angle which is assumed by the charged particles released by the sample and which extends into the interior and a distance between the sample and the distal end of the interior are greater in the vacuum-pressure operating mode than in the near-atmospheric-pressure operating mode. This allows the entrance portion to receive more electrons per unit time in different pressure environments of the entrance portion and can allow improved analysis of a sample.

The invention relates to an electron imaging apparatus (23) configured to be connected to an energy analyzer apparatus. The electron imaging apparatus comprises a receiving aperture (22), a control unit, and a field generating unit (65). The receiving aperture is configured for receiving electrons from a focal volume (200) which form an electron beam (25). The control unit is configured for providing a control signal to the field generating unit based on a desired height of the electron beam in an energy dispersive direction (y) of the energy analyzer apparatus at a proximal end (90) of the electron imaging apparatus and a desired angular distribution (αp) in the energy dispersive direction at the proximal end. The field generating unit is configured for generating at least one electrostatic, magnetic, or electrostatic and magnetic field based on the at least one control signal such that the at least one electrostatic, magnetic, or electrostatic and magnetic field is configured for exerting a force on the electrons of the electron beam in the energy dispersive direction such that a height of the electron beam in the energy dispersive direction at the proximal end corresponds to the desired height in the energy dispersive direction at the proximal end and an angular distribution in the energy dispersive direction at the proximal end corresponds to the desired angular distribution in the energy dispersive direction at the proximal end.

To provide an energy spectrometer with dynamic focus for a transmission electron microscope (TEM).SOLUTION: An energy spectrometer 204 and a TEM 202 at least include a charged particle column including a projection system 208 arranged after a sample plane, where the projection system is operated in a first configuration. The energy spectrometer 204 includes a dispersive element 212, a bias tube 214, optics for magnifying the energy loss spectrum and for correcting aberrations, and a detector 222 arranged conjugately to a spectrum plane of the energy spectrometer 204. The energy spectrometer further includes an optical element 234 electrically biased to refocus at least a portion of a spectrum on the detector 222. The value of the electrical bias is at least partially based on the first configuration of the charged particle column.SELECTED DRAWING: Figure 2

A time-of-flight mass spectrometer is disclosed comprising ion optics that map an array of ions at an ion source array (71) to a corresponding array of positions on a position sensitive ion detector (79). The ion optics include at least one gridless ion mirror (76) for reflecting ions, which may compensate for various aberrations and allows the spectrometer to have relatively high mass and spatial resolutions.

The present invention provides an electron imaging device for electron transfer from an electron optical axis of a sample emitting electrons to an energy analyzer device, comprising a first lens group, a second lens group and a deflector device, which deflects electrons in an exit plane of the electron imaging device along a deflection direction perpendicular to the electron optical axis, the first lens group forms a first reciprocal plane in the first lens group, forms a first Gaussian plane between the first lens group and the second lens group, generates a first momentum distribution image of electron momentum distribution in the first reciprocal plane, generates a first Gaussian image of the sample in the first Gaussian plane, the second lens group forms a second reciprocal plane on the analyzer side of the second lens group, generates a second momentum distribution image of electron momentum distribution in the second reciprocal plane, and the first lens group is capable of generating a first Gaussian image with a sufficiently small size so that the second momentum distribution image is a parallel image. An electron energy spectrometer device, an electron transfer method and an electron energy spectrometer method are also described.

An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G0, a second conductive grid, G1, a third conductive grid, G2, a fourth conductive grid G3, and a collection electrode, C, each grid separated by an insulating layer, a battery power supply and a battery manager integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser, and a high voltage generating circuit within the substrate, wherein the high voltage generating circuit takes the output voltage of the battery manager and supplies a voltage sweep to the third conductive grid.

To provide an electron spectrometer capable of detecting fast electrons from slow electrons with high resolution.SOLUTION: An electron spectrometer according to the present disclosure includes an excitation unit 100 that irradiates a sample with an energy beam, a circulating unit 10 that circulates electrons emitted from the sample irradiated with an energy ray, and a detection unit 120 that detects electrons extracted from the circulation unit 10, and the circulation unit 10 includes a plurality of electrode pairs, the plurality of electrode pairs control the applied voltage to cause electrons to circulate, and some of the plurality of electrode pairs are capture electrode pairs that capture electrons into the circulation unit 10 by controlling the applied voltage, and some of the plurality of electrode pairs are extracting electrode pairs that extract electrons from the circulating unit 10 by controlling the applied voltage.SELECTED DRAWING: Figure 1

A method for purifying particles includes generating charged particles from a sample, measuring at least one of the mass, charge magnitude, and mobility of the generated charged particles, and selectively passing each measured charged particle having at least one of (a) a measured mass equal to or within a selected particle mass range, (b) a measured charge magnitude equal to or within a selected charge magnitude range, (c) a mass-to-charge ratio equal to or within a selected mass-to-charge ratio range, and (d) a measured mobility equal to or within a selected mobility range to a particle collection target. In some embodiments, the collected particles can be harvested and amplified.

The present application provides a kind of electrostatic deflection convergent energy analyzer, it has wide receiving angle and high two-dimensional convergent performance, can carry out imaging to two-dimensional real space image or emission angle distribution, and can carry out two-dimensional convergent and imaging under 90 ° deflection relative to the direction of incidence. One or more outer electrodes and multiple inner electrodes are arranged along the shape of two rotors formed on the inner side and outer side of common rotation axis. Among them, the inner surface shape of outer electrode is tapered, the diameter of which decreases towards both ends, and the outer surface shape of inner electrode is tapered, the diameter of which decreases towards both ends. Electron entrance hole and exit hole are formed on the outer electrode at both ends of the rotation axis respectively. Voltage for electron acceleration and deceleration is applied to outer electrode and inner electrode in proportion to the energy of incident electron. Voltage is applied to one or more electrodes except the inner electrode at both ends, which is twice or more than the converted acceleration voltage obtained by converting the energy of electron into acceleration voltage based on the potential of outer electrode where entrance hole is formed.

A time-of-flight mass spectrometer is disclosed comprising ion optics that map an array of ions at an ion source array 71 to a corresponding array of positions on a position sensitive ion detector 79. The ion optics include at least one gridless ion mirror 76 for reflecting ions, which may compensate for various aberrations and allows the spectrometer to have relatively high mass and spatial resolutions.

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.

The invention relates to the provision of a suitable interior for a near-atmospheric-pressure operating mode and a vacuum-pressure operating mode of an entrance portion of a material analysis system. The entrance portion comprises a housing which is designed for vacuum pressure and for near-atmospheric pressure and which has an interior that can be provided according to an operating mode of the material analysis system, which interior is designed to receive, at its distal end via an entrance opening, charged particles released by a sample. The entrance portion also comprises an interior-providing device which is designed to provide the interior in the near-atmospheric-pressure operating mode in such a way that a near-atmospheric pressure is reduced, from the distal end of the interior to the proximal end of the interior, to a vacuum pressure and to provide the interior in a vacuum-pressure operating mode in such a way that a solid angle which is assumed by the charged particles released by the sample and which extends into the interior and a distance between the sample and the distal end of the interior are greater in the vacuum-pressure operating mode than in the near-atmospheric-pressure operating mode. This allows the entrance portion to receive more electrons per unit time in different pressure environments of the entrance portion and can allow improved analysis of a sample.

An instrument for analyzing ions may include an ion source to generate ions, at least one ion processing instrument to process the generated ions by one or both of filtering the ions according to a molecular characteristic and dissociating the ions, and an electrostatic linear ion trap (ELIT) to receive and trap ions exiting the at least one ion processing instrument. The ELIT has first and second ion mirrors separated by a charge detection cylinder, and is configured such that trapped ions oscillate back and forth through the charge detection cylinder between the first and second ion mirrors with a duty cycle, corresponding to a ratio of time spent by the trapped ions traversing the charge detection cylinder and total time spent by the trapped ions traversing a combination of the first and second ion mirrors and the charge detection cylinder during one complete oscillation cycle, of approximately 50%.

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.

The utility model discloses particle energy analysis equipment, which comprises detection equipment, a lens system and rotating equipment, and is characterized in that the detection equipment is provided with an inlet slit allowing particles to enter; the lens system is positioned between the charged particle sample and the entrance slit, is used for forming a particle beam of charged particles and transmitting the particle beam, and is provided with a straight optical axis; and a rotating device disposed at the lens system for causing the particle beam to rotate before the particle beam enters the entrance slit. The magnetic field rotation technology is adopted in the lens system, on one hand, the receiving angle can be amplified, the measurement efficiency is improved, on the other hand, the electrostatic field of the lens system is axially symmetric all the time, the particle flying process is axially symmetric, and the distortion problem can be effectively solved.

A charged particle spectrometer (100) and a method for calibration of a multichannel particle detector (4) in a charged particle spectrometer (100) are described. The charged particle spectrometer (100) comprises a deflection analyser (101) having a first end (1) with an entrance (2) for charged particles, and a second end (3), a multichannel particle detector (4) arranged at the second end (3) of the deflection analyser (101), and an electrostatic lens system (102), which is arranged to transport charged particles from a sample (6) to the entrance (2) of the deflection analyser (101). The charged particle spectrometer (100) comprises a calibration particle detector (7) which is arranged at the second end (3) along the detection line (5), wherein the count rate linearity of calibration particle detector (7) is better than the count rate linearity of the particle detector (4).

The invention relates to a transverse energy compensator (1) for a spectrometer (2), in particular of the MAC-E filter type, for pre-processing charged particles (A), wherein the transverse energy compensator (1) has a particle input (3) and a particle output (4), the transverse energy compensator (1) has a coil (5) for generating a magnetic field (6), the transverse energy compensator (1) has a drift tube (7) arranged in the magnetic field (6), wherein the drift tube (7) is arranged such that the charged particles (A) are moved from the particle input (2) through the drift tube (7) to the particle output (3), and a predefined and changeable potential (8) can be applied at the drift tube (7). The invention makes it possible to improve the energy resolution when measuring charged particles (A) without it being necessary to increase the dimensions or further reduce the magnetic field at the analysis level.

The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.