11results about "Static energy spectrometers" patented technology

An apparatus for obtaining ion energy distribution measurements in a plasma processing system comprising a substrate, an ion energy sensor and associated control circuitry disposed in the substrate, and a conductive enclosure disposed in the substrate and surrounding the ion energy sensor and control circuitry such that the substrate at least partially surrounds the conductive enclosure.

An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G0, a second conductive grid, G1, a third conductive grid, G2, a fourth conductive grid G3, and a collection electrode, C, each grid separated by an insulation layer, a battery power supply and control circuitry, integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser; wherein at least one insulation layer includes a peripheral portion which is of reduced thickness with respect to the remaining portion of the insulation layer.

The invention relates to an electron imaging apparatus (23) configured to be connected to an energy analyzer apparatus. The electron imaging apparatus comprises a receiving aperture (22), a control unit, and a field generating unit (65). The receiving aperture is configured for receiving electrons from a focal volume (200) which form an electron beam (25). The control unit is configured for providing a control signal to the field generating unit based on a desired height of the electron beam in an energy dispersive direction (y) of the energy analyzer apparatus at a proximal end (90) of the electron imaging apparatus and a desired angular distribution (αp) in the energy dispersive direction at the proximal end. The field generating unit is configured for generating at least one electrostatic, magnetic, or electrostatic and magnetic field based on the at least one control signal such that the at least one electrostatic, magnetic, or electrostatic and magnetic field is configured for exerting a force on the electrons of the electron beam in the energy dispersive direction such that a height of the electron beam in the energy dispersive direction at the proximal end corresponds to the desired height in the energy dispersive direction at the proximal end and an angular distribution in the energy dispersive direction at the proximal end corresponds to the desired angular distribution in the energy dispersive direction at the proximal end.

The present application provides a kind of electrostatic deflection convergent energy analyzer, it has wide receiving angle and high two-dimensional convergent performance, can carry out imaging to two-dimensional real space image or emission angle distribution, and can carry out two-dimensional convergent and imaging under 90 ° deflection relative to the direction of incidence. One or more outer electrodes and multiple inner electrodes are arranged along the shape of two rotors formed on the inner side and outer side of common rotation axis. Among them, the inner surface shape of outer electrode is tapered, the diameter of which decreases towards both ends, and the outer surface shape of inner electrode is tapered, the diameter of which decreases towards both ends. Electron entrance hole and exit hole are formed on the outer electrode at both ends of the rotation axis respectively. Voltage for electron acceleration and deceleration is applied to outer electrode and inner electrode in proportion to the energy of incident electron. Voltage is applied to one or more electrodes except the inner electrode at both ends, which is twice or more than the converted acceleration voltage obtained by converting the energy of electron into acceleration voltage based on the potential of outer electrode where entrance hole is formed.

The invention relates to the provision of a suitable interior for a near-atmospheric-pressure operating mode and a vacuum-pressure operating mode of an entrance portion of a material analysis system. The entrance portion comprises a housing which is designed for vacuum pressure and for near-atmospheric pressure and which has an interior that can be provided according to an operating mode of the material analysis system, which interior is designed to receive, at its distal end via an entrance opening, charged particles released by a sample. The entrance portion also comprises an interior-providing device which is designed to provide the interior in the near-atmospheric-pressure operating mode in such a way that a near-atmospheric pressure is reduced, from the distal end of the interior to the proximal end of the interior, to a vacuum pressure and to provide the interior in a vacuum-pressure operating mode in such a way that a solid angle which is assumed by the charged particles released by the sample and which extends into the interior and a distance between the sample and the distal end of the interior are greater in the vacuum-pressure operating mode than in the near-atmospheric-pressure operating mode. This allows the entrance portion to receive more electrons per unit time in different pressure environments of the entrance portion and can allow improved analysis of a sample.

A charged particle spectrometer (100) and a method for calibration of a multichannel particle detector (4) in a charged particle spectrometer (100) are described. The charged particle spectrometer (100) comprises a deflection analyser (101) having a first end (1) with an entrance (2) for charged particles, and a second end (3), a multichannel particle detector (4) arranged at the second end (3) of the deflection analyser (101), and an electrostatic lens system (102), which is arranged to transport charged particles from a sample (6) to the entrance (2) of the deflection analyser (101). The charged particle spectrometer (100) comprises a calibration particle detector (7) which is arranged at the second end (3) along the detection line (5), wherein the count rate linearity of calibration particle detector (7) is better than the count rate linearity of the particle detector (4).

The invention relates to a transverse energy compensator (1) for a spectrometer (2), in particular of the MAC-E filter type, for pre-processing charged particles (A), wherein the transverse energy compensator (1) has a particle input (3) and a particle output (4), the transverse energy compensator (1) has a coil (5) for generating a magnetic field (6), the transverse energy compensator (1) has a drift tube (7) arranged in the magnetic field (6), wherein the drift tube (7) is arranged such that the charged particles (A) are moved from the particle input (2) through the drift tube (7) to the particle output (3), and a predefined and changeable potential (8) can be applied at the drift tube (7). The invention makes it possible to improve the energy resolution when measuring charged particles (A) without it being necessary to increase the dimensions or further reduce the magnetic field at the analysis level.

An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G0, a second conductive grid, G1, a third conductive grid, G2, a fourth conductive grid G3, and a collection electrode, C, each grid separated by an insulation layer, a battery power supply and control circuitry, integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser; wherein at least one insulation layer includes a peripheral portion which is of reduced thickness with respect to the remaining portion of the insulation layer.