The invention relates to a
charged particle beam deflection device. The
charged particle beam deflection device comprises a first
electrode and a second
electrode, the first
electrode is provided with a first through hole, and the second electrode is provided with a second through hole. The central axis of the first through hole is a first axis, the central axis of the second through hole is a second axis, and the first axis and the second axis are located on the same plane and form a certain included angle. The first electrode and the second electrode are arranged at an interval, and an area therebetween forms a deflection area. Different voltages are applied to the first electrode and the second electrode respectively, a non-axisymmetric
electric field can be formed in the deflection area, and therefore the deflection direction of the
charged particle beam penetrating through the deflection area is regulated and controlled. Through an innovatively designed electrode structure and a non-axisymmetric
electric field constructed by the electrode structure, integrated regulation and control of
particle beam deflection and focusing are realized,
neutral particle noise is remarkably inhibited, the
signal-to-
noise ratio is greatly improved, adhesion
pollution of neutral particles on the surface of a downstream device is effectively reduced, and the device has a good application prospect. Therefore, the maintenance period of the equipment is obviously prolonged.