The invention discloses a micro-nano
movement system posture control device adopting an optical balancing method and belongs to the technical field of precision measurement of geometric quantities. The device mainly comprises a
control system module, an optical measurement module, a photoelectric
demodulation module and an execution mechanism module. Accurate information of a position is determined with
light energy and local interference modulated frequency information, wherein the position information is used for posture control in the movement of a micro-nano
movement system.
Light energy in a measurement
signal is used for guaranteeing determination of an effective area of the measured
signal, the interference modulated frequency information is used for judging the position of a
balance point in the measurement area, and finally, operation and driving of the execution mechanism are performed in the
control system module to guarantee that the movement posture of the micro-nano
movement system is stable and controllable. The problems that posture measurement sensitivity of common movement systems is low, measurement drifting exists and the like can be solved, the device is relatively simple in structure, integration and portable performance of the movement
system are favorably improved, the device is high in measurement efficiency and good in resolving power, and the instantaneity and the accuracy of posture control are favorably improved.