The invention discloses an improved exhaust gas emission device for a diffusion furnace. The device comprises a first gas surge flask, a ventilation device, a pressure monitoring device and a nitrogen compensation device. The pressure monitoring device and the nitrogen compensation device are in one-way connection; one end of the first gas surge flask is sequentially connected with a second surge flask,... an N surge flask, and then connected to the ventilation device; and the pressure monitoring device is arranged on any gas surge flask after the gas surge flask, which the nitrogen gas compensation device is in, or a connecting pipe between gas surge flasks. According to the invention, on the basis of the original device, the number of gas surge flasks is increased, the position of the pressure monitoring device is adjusted, so as to avoid lagging gas compensation, directly reduce influences of fluctuations of the ventilation device on the flow in a quartz tube, facilitate stability of flow in the quartz tube, ensure constant pressure of flow in the diffusion quartz tube, improve process stability, and ensure uniformity of square resistance and the quality of a PN junction.