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Detection method of scanning electron microscope

The invention relates to a detection method of a scanning electron microscope. The detection method can be used for detecting the defect of a wafer provided with a plurality of chips, and comprises the steps of: importing a file of the wafer with a defect; putting the wafer to be detected on an objective table of the scanning electron microscope; setting a corner of a certain chip arranged on the wafer to be detected as an initial position; correcting the position of the wafer to be detected; obtaining the offset value of the levels of the wafers arranged at the central parts of cavities of two machine types; selecting the chip to be detected, and correcting the coordinate of the corner of the chip in a defect scanning machine according to the offset value of the levels of the wafers; leading the corner of the chip to be moved to the center of the image of a display device in a state of amplifying the image, and obtaining the offset value of the levels of the chips arranged at the central parts of the cavities of the two machine types; obtaining the corrected coordinate of the defect based on the offset value of the levels of the wafers and the offset value of the levels of the chips; and according to the corrected coordinate of the defect, leading the defect to be detected to be positioned under an electron gun of the defect scanning machine, and therefore, the feature of the defect can be rapidly and accurately caught.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Roadside parking vehicle real-time acquisition management system and management method

According to the roadside parking vehicle real-time acquisition management system and management method provided by the invention, inspection equipment is adopted for inspection, a manual inspection mode is replaced, the inspection efficiency is improved, and the inspection cost is reduced; a vehicle tail license plate scanned and identified by a front camera and a vehicle head license plate scanned and identified by a rear camera in the acquisition subsystem are mutually verified, so that the accuracy of license plate information is ensured, and rapid snapshot of illegally parked vehicles isrealized; a core analysis module of the inspection subsystem compares the parking coordinates, obtained in real time, of the vehicle with the planned road parking coordinates collected by a GPS collection module, and rapidly judges whether the vehicle is located within the parking range or not; the network transmission module transmits the information of the vehicle to the management subsystem inreal time through the Internet, thereby achieving the reporting and charging of the standard parking information. The roadside parking vehicle real-time acquisition and management system is fast and safe in the whole process, realizes intellectualization, can monitor illegally parked vehicles, and can replace a manual inspection mode.
Owner:江西山水光电科技股份有限公司
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