The utility model relates to a back-illuminated
image sensor, which comprises a device
wafer, an
isolation layer, an isolation lamination layer and a filter layer, and is characterized in that the device
wafer comprises the
isolation layer covering a plurality of groove isolation structures; the surface, deviating from the trench isolation structure, of the
isolation layer comprises isolation laminated
layers and filter
layers which are alternately distributed in the first direction; the isolation laminated layer comprises a first
dielectric layer, a second
dielectric layer located between the first
dielectric layer and the isolation layer, and a conductive layer located on the outer side surface of the second
dielectric layer, and the
refractive index of the conductive layer is located in a target
refractive index range. The second
dielectric layer is arranged in the isolation lamination layer, and the conductive layer is arranged on the outer side surface of the second
dielectric layer, so that the stress of the isolation lamination layer on the device
wafer is small, the problem that the warping degree of the device wafer is too large due to the large stress of the isolation lamination layer is solved, and the
refractive index of the conductive layer is within the target refractive index range; optical
crosstalk can be effectively avoided, and the quality of a backside illuminated sensor product is improved.