The invention provides a method and a
system for automatically inspecting a
semiconductor factory by an
intelligent agent, which are applied to the technical field of
semiconductor manufacturing, and the method comprises the following steps: firstly, constructing and configuring an inspection
intelligent agent at least comprising an equipment interface, a
knowledge base and a
workflow engine through an
intelligent agent configuration platform; then, in a 2.5 D on-line
semiconductor factory where physical factory
layout and equipment are mapped, the intelligent agent is driven to execute the defined inspection process, and sensor data are obtained in real time; and finally, the
workflow engine controls the intelligent agent to carry out anomaly recognition and
root cause analysis on the data, and an inspection report is automatically generated in combination with a
knowledge base, so that 7 * 24-hour uninterrupted intelligent and automatic factory inspection is realized, a large amount of vigor of engineers originally invested in repeated inspection is effectively released, and the inspection efficiency is improved. According to the method, engineers are enabled to concentrate on key areas such as high-value decision analysis and
process optimization, the labor cost is remarkably reduced, the operation efficiency is improved, and stable operation of a
semiconductor factory is ensured.