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37results about How to "Improve ESD tolerance" patented technology

LDMOS (Laterally Diffused Metal Oxide Semiconductor) device and manufacturing method thereof

The embodiment of the invention discloses an LDMOS (Laterally Diffused Metal Oxide Semiconductor) device and a manufacturing method thereof. The LDMOS device comprises a substrate, wherein the substrate comprises a first trap region, a second trap region positioned in a surface of the first trap region, a doped region positioned in a surface of the second trap region, field oxide positioned on the periphery of the doped region and a drift region positioned at the lower part of the field oxide, wherein a drain region is positioned in a surface of the doped region, and a certain distance is arranged between an edge of the drain region and an edge of the drift region. According to the invention, since the distance between the edge of the drain region and the edge of the drift region is changed and increased, the resistance between the edge of the drain region and the edge of the drift region is increased, a current flow path between the edge of the drain region and the edge of the drift region is increased, the maintaining voltage of the device is improved, therefore when an ESD (Electrostatic Discharge) phenomenon occurs, current between the drain region and the drift region is not concentrated, the caloric power of the device is reduced so as to avoid burn-out of the device, and the withstanding capability of the LDMOS device to ESD is improved.
Owner:CSMC TECH FAB2 CO LTD

ldmos device and its manufacturing method

An LDMOS component and a manufacturing method therefor. The component comprises a substrate. The substrate comprises a first well region (201), a second well region (202) located within a surface of the first well region (201), a doped region (203) located within a surface of the second well region (202), a field oxide (204) located at a periphery of the doped region (203), a drift region (205) located under the field oxide (204), and a drain region (206) located within a surface of the doped region (203), where a certain distance is provided between an edge of the drain region (206) and an edge of the drift region (205). The component increases the distance between the edge of the drain region and the edge of the drift region, thereby increasing the resistance between the edge of the drain region and the edge of the drift region, increasing a flow path of electric current between the edge of the drain region and the edge of the drift region, and thus increasing a sustained voltage of the component. Hence when an instance of ESD occurs, as the electric current between the drain region and the drift region is no longer concentrated, the amount of heat generated by the component is reduced, and a burnout of the component is prevented, thus providing the LDMOS component with enhanced tolerance against ESD.
Owner:CSMC TECH FAB2 CO LTD

Semiconductor device

Provided is a semiconductor device having high ESD tolerance. A first via (16) is used for electrically connecting a pad (22) to a drain of an NMOS transistor of an ESD protective circuit. The first vias (16) are formed under the pad (22) only on one side of a rectangular ring-shaped intermediate metal film (17) and on another side thereof opposed to the one side. In other words, all the first vias (16) for establishing an electrical connection to the drains are present substantially directly under the pad (22). Consequently, a surge current caused by ESD and applied to the pad (22) is more likely to flow uniformly among all the drains. Then, respective channels of the NMOS transistor of the ESD protective circuit are more likely to uniformly operate, and hence the ESD tolerance of the semiconductor device is increased.
Owner:ABLIC INC

Electrostatic protection element layout structure with high electrostatic discharge tolerance

The invention discloses an electrostatic protection element layout structure with high electrostatic discharge tolerance. The structure comprises a plurality of NMOS transistors connected in parallel,wherein the NMOS transistors connected in parallel form an isolated NMOS multi-finger type semiconductor layout structure, a middle region of the isolated NMOS multi-finger semiconductor layout structure is a P-type doped region doped with high-energy P-type implanted ion concentration, so substrate resistance of the middle region is reduced. The structure is advantaged in that the total substrate resistance of the NMOS transistors corresponding to the middle region can be reduced, substrate resistance difference between the NMOS transistor corresponding to the middle region and the NMOS transistor corresponding to one of the NMOS transistors at two sides is reduced, so the NMOS transistors can be uniformly conducted, and the electrostatic discharge tolerance of the NMOS transistors is improved.
Owner:ADVANCED ANALOG TECH INC
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