43 results about "Partial coherence" patented technology

The invention discloses a rapid calculation method for realizing tight focusing of partially coherent light. The method comprises the following steps: S10, enabling one part of coherent light beam tobe expanded into a plurality of completely coherent sub light sources and enabling the plurality of completely coherent sub light sources to be independent from each other; S20, enabling the pluralityof completely coherent sub light sources to respectively pass through a tight focusing system and acquiring tight focusing light field distribution respectively corresponding to the plurality of completely coherent sub light sources by utilizing a tight focusing fast algorithm; S30, carrying out incoherent superposition on the obtained distribution of the plurality of tightly focused light fieldsto obtain a superposed total light field so as to obtain tightly focused focal field distribution under the partially coherent light beam incident condition. According to the disclosed method, the quadruple integral form of a vector diffraction integral formula under the condition of partial coherent light incidence is changed into a fast Fourier transform and summation form, so that the calculation time is shortened, the calculation efficiency is improved, and the tight focusing calculation precision under the condition of partial coherence is greatly improved; and the distortion in the calculation process is also reduced.

A simplified coherency controller supports multiple exclusively active fully coherent agent interfaces and any number of active I / O (partially) coherent agent interfaces. A state controller determines which fully coherent agent is active. Multiple fully coherent agents can be simultaneously active during a short period of a transition of processing from one to another processor. Multiple fully coherent agents can be simultaneously active, though without a mutually consistent view of memory, which is practical in cases such as when running multiple operating systems on different processors.

A fast method simulates photolithography using conventional image processing techniques. Convolution simulates blurring due to optics; erosion and dilation correct for edge diffraction. To produce the convolution kernel, an effective projection lens image for the image source is produced by convolving the lens image with an image of the illuminator aperture shape. An effective projection lens image for the stepper is produced similarly. The stepper effective lens image is divided by the image source effective lens image to produce a corrected effective lens image. A corrected convolution kernel is produced by taking a Fourier transform of the corrected effective lens image. The kernel is used to convolve the image, once using energy and once using voltage, and then squaring the result. The aerial image is produced by blending the energy and voltage convolutions according to the computed partial coherence of the optics. Complex convolution is used to represent relative phases other than 180 degrees.

The invention discloses a system used for producing a Laguerre-Gaussian correlated partial coherence gauss beam. The system comprises a beam expander, a spatial light modulator, a beam shrinking mirror, a ground glass sheet, a lens and a Gaussian filter sheet along the direction of light in sequence. A computer-generated hologram forms a computer-generated holographic grating after being loaded on the spatial light modulator, and then a Laguerre-Gaussian beam with only an angular module is produced. The beam shrinking mirror is used for controlling the spot size of the Laguerre-Gaussian gauss beam on the rotary ground glass sheet to adjust coherence of an outgoing beam. The ground glass sheet is used for changing the Laguerre-Gaussian gauss beam to the Laguerre-Gaussian correlated partial coherence gauss beam. The lens is used for collimation of the partial coherence gauss beam. The Gaussian filter sheet is used for converting light distribution of the beam to Gaussian distribution. Due to flexibility of the computer-generated hologram, Laguerre-Gaussian beams with different orders and only angular modules can be produced by producing different holograms, and therefore Laguerre-Gaussian correlated partial coherence gauss beams with different orders are produced.

A partial coherence interferometer incorporates a focusing system for resolving measurement ambiguities. A focus-sensing beam is directed through a common objective with the measurement beam of the interferometer for conveying the beams to and from a test surface. An unambiguous measuring range is equated to a predetermined range of focusing errors.

An illumination system having an array optical element with different illumination regions corresponding or matched to different line width variations printed on a photosensitive material. The array optical element may be a filter, diffractive optical element, or micro lens array having illumination regions producing different types of illumination properties or characteristics. Each of the illumination regions are matched or correspond to a respective region on a patterning device to provide optimized exposure of a photosensitive material. The optical element may be used to tailor a conventional illumination system to the unique characteristics of the projection optics used in a system, thereby compensating for vertical and horizontal bias or variations in line width for features oriented in the vertical and horizontal direction.

A zero power identical pair of oppositely-oriented meniscus lens elements mounted in the projection light path, serves as curved mask support while compensating for optical anomalies such as beam shift and beam deviations produced by other transparent supports for the curved mask. The zero-power meniscus lens pair, without affecting the transmission beam characteristics, lets the beam diffract as efficiently as does a regular planar mask, thus preserving the partial coherence effects and resolution concepts of projection lithography. This simple but novel optics device is not only expected to clear several barriers for curved mask projection lithography but also find place in other applications where collimated or converging light beams have to travel extra paths without significant aberration.

A profilometer incorporating a partial coherence interferometer directs a beam containing a band of wavelengths along object and reference arms of the interferometer into respective engagements with a test object surface and a reference object surface en route to a spectrometer for measuring a spectrum of the beam. Within the object arm, the test object surface is relatively moved through a range of positions offset from a null position at which optical path lengths of the object and reference arms are equal. Modulation frequencies of the beam spectrum are calculated at a succession of different focus spot positions across the test object surface. Changes in the modulation frequency are interpreted to distinguish between optical path length differences at which the optical path length of the object arm is longer or shorter than the optical path length of the reference arm.

A laser therapy method and apparatus is disclosed. The optical coherence property of the therapy laser is actively controlled to provide optimum therapy results for difference types of biological tissue and body parts.

The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.

A method for identifying non-stationary sound source characteristics using partial coherence technology belongs to the field of noise in physics. In the case where multiple sound sources generate complex cyclostationary sound fields, the present invention adopts cyclostationary theory instead of Fourier transform, proposes a partial coherence analysis technology suitable for cyclostationary sound fields, and uses it in the partial sound field separation of cyclostationary sound fields, the method As follows: first determine the number and location of the reference source, arrange the reference source microphone array, extract the reference source signal, then design the microphone array to scan and measure the holographic surface, collect the holographic surface data, and then use the cyclostationary partial coherence analysis technology to separate Part of the sound field for each sound source. The present invention can analyze the complex cyclostationary sound field formed by multiple cyclostationary sound sources, obtain the partial sound field formed by each sound source, and also calculate the three-dimensional sound field formed by a single sound source from the sound pressure signal measured on the holographic plane. The sound field distribution realizes the visualization of the propagation path of each sound source.

The invention discloses a system and method for carrying out in-situ detection on the odd aberration of a projection objective for photoetching machines. The system comprises a light source, a lighting system, a masking platform, a mask, a projection objective, an operating platform, an image sensing device, an interferometer and a data processing device, wherein the mask contains a detection mark, and the interferometer is used for position control. The method comprises the following steps: calibrating corresponding odd-aberration sensitivity coefficients of the projection objective through setting different partial coherence factors and numerical apertures; then, measuring the value of difference between the peak value and light intensity of a space image of the detection mark by using the image sensing device; and finally calculating the odd aberration of the projection objective by using the calibrated odd-aberration sensitivity coefficients. The system and method disclosed by theinvention have the advantage of improving the accuracy of detection on the odd aberration of the projection objective for photoetching machines.

The invention discloses a system used for producing a Laguerre-Gaussian correlated partial coherence gauss beam. The system comprises a beam expander, a spatial light modulator, a beam shrinking mirror, a ground glass sheet, a lens and a Gaussian filter sheet along the direction of light in sequence. A computer-generated hologram forms a computer-generated holographic grating after being loaded on the spatial light modulator, and then a Laguerre-Gaussian beam with only an angular module is produced. The beam shrinking mirror is used for controlling the spot size of the Laguerre-Gaussian gauss beam on the rotary ground glass sheet to adjust coherence of an outgoing beam. The ground glass sheet is used for changing the Laguerre-Gaussian gauss beam to the Laguerre-Gaussian correlated partial coherence gauss beam. The lens is used for collimation of the partial coherence gauss beam. The Gaussian filter sheet is used for converting light distribution of the beam to Gaussian distribution. Due to flexibility of the computer-generated hologram, Laguerre-Gaussian beams with different orders and only angular modules can be produced by producing different holograms, and therefore Laguerre-Gaussian correlated partial coherence gauss beams with different orders are produced.