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High-precision six-axis motion platform

PendingCN122723571AEliminate positioning deviationEliminate cumulative errors
The application discloses a high-precision six-axis motion platform, which comprises a steel frame assembly, a stone material assembly, an XY-axis assembly, an AC-axis rotary table, a Z-axis assembly and a B-axis rotary table, the stone material assembly is installed on the steel frame assembly, the XY-axis assembly is installed on a base of the stone material assembly, the AC-axis rotary table is horizontally installed on a Y-axis load plate of the XY-axis assembly, the Z-axis assembly is vertically installed on a cross beam of the stone material assembly, and the B-axis rotary table is installed on a Z-axis load plate of the Z-axis assembly. The six-degree-of-freedom independent collaborative control is realized through the brand-new modular independent partition structure and the direct drive transmission-free scheme, the transmission gap and coupling error are eliminated from the mechanical root, the platform positioning precision, the dynamic response speed and the structural rigidity are simultaneously improved, the assembly and calibration process is simplified, the production and maintenance costs are reduced, and the high-precision operation of the semiconductor and optical detection fields is adapted to the harsh working conditions.
Owner:BEIJING RUIBANG PRECISION CONTROL TECH CO LTD