The present application relates to the technical field of
radio frequency power supply, in particular to a power supply
system and a matching method suitable for multi-stage pulse, the power supply
system comprises: a
radio frequency power supply, outputting multi-stage pulse; a matching network, comprising a mechanical
variable capacitor and a switch
capacitor array, connected between the
radio frequency power supply and a load, the present application matches the multi-stage pulse by mixing the
impedance network and the frequency of the radio frequency power supply, so as to achieve the purpose of quickly matching the multi-stage pulse, meanwhile, by using the idea of segmented matching, the first stage pulse of the multi-stage pulse is matched in impedance by the mechanical
variable capacitor and the frequency of the radio frequency power supply, in the subsequent pulse, the
capacitance value of the mechanical
variable capacitor is kept unchanged, and the impedance is matched by the switch
capacitor array and the frequency of the radio frequency power supply, so as to realize the fast and accurate
impedance matching in the complex multi-stage pulse process, and ensure that the
radio frequency energy is transmitted to the load efficiently and stably.