The application discloses a
microwave ion source multi-pin automatic
impedance matching method and device, and relates to the field of
microwave ion source technology.The
microwave ion source multi-pin automatic impedance device comprises a
microwave transmission line, pins, a reflected power detection unit, a driving mechanism and a controller, one end of the pin is inserted into the
microwave transmission line and is driven to adjust the
insertion depth by the driving mechanism, each pin moves independently, the reflected power detection unit is used for detecting the reflected power from the direction of the
plasma load, and the controller is configured to execute the microwave
ion source multi-pin automatic
impedance matching method.Through the configuration of a plurality of pins capable of
coordinated movement on the
microwave transmission line, the reflected power detection unit capable of automatically detecting the reflected power and the controller executing a sequential-cyclic
approximation algorithm, the plurality of pins are sequentially subjected to local optimal search, and multiple rounds of iteration are performed until the
system global optimization, so that the reflected power is finally suppressed to the lowest level, the automatic matching and dynamic tracking are realized, and the
optimal matching state is dynamically maintained during the working process.