The present invention discloses a tubular reaction device for preparing
semiconductor materials, which belongs to the technical field of
semiconductor material preparation, and comprises a
reaction tube body and a first end cap and a second end cap arranged at both ends thereof, wherein the first end cap and the second end cap are respectively provided with a first cover plate and a second cover plate at the connection places with the two ends of the
reaction tube body; a row of first through holes is provided on the first cover plate along the
diameter direction, and a plurality of pairs of second through holes are distributed along the radial direction on the second cover plate, and each pair of second through holes is fixedly connected with two leg tubes of a Y-type three-way
pipe arranged on the second cover plate, and the top tube of the Y-type three-way
pipe is fixedly connected with the lower end of a stainless steel casing, and the top end of the stainless steel casing is connected to the first through hole; a mixing core tube and a
ceramic tube are arranged inside the stainless steel casing, and the reaction solution is mixed through the mixing core tube and then flows through the
ceramic tube and is discharged from the liquid outlet tube. The present invention is provided with a plurality of groups of mixing core tubes and
ceramic tubes, which can improve the reaction efficiency and
processing capacity of the tubular reaction device.