The application belongs to the technical field of
nanostructure manufacturing, and discloses a method for modifying 3D nano patterns by
plasma and guiding self-
assembly of block copolymers. The preparation steps of the application include:
grafting polymer brushes / felts to a
substrate surface, cleaning,
spin coating photoresist,
exposure, development,
plasma modification and cleaning. In the method, the interface free energy between the block
copolymer and the
brush / felt is adjusted by modifying the
polymer brush / felt by
plasma, so that a non-selective substrate is obtained. The method is easy to implement, simple to synthesize, and is a way to obtain neutral molecular brushes worthy of promotion. At the same time, the block
copolymer is guided to carry out density multiplication
assembly, and a defect-free long-range ordered morphology is obtained. Compared with the traditional chemical pattern method, the method reduces the step of trimming
etching, has lower requirements for equipment in the preparation process, and has a simple preparation process and is easy to control. By changing the
exposure dose and
oxygen plasma modification conditions, different block copolymers can be guided to carry out
assembly, and a higher density multiplication effect can be obtained.