The invention discloses a splicing
laser interference lithography equipment suitable for the manufacture of large-area nanometer structures, which is composed of a main body, a
laser light wave supply unit installed on the main body, a reflection mechanism, an L-shaped fixing mechanism and a substrate carrier; The
radiation wave supply unit includes a
laser light source generator, a
shutter, a pinhole and a lens; the reflection mechanism includes a three-dimensional movable bracket and a second reflector, the second reflector is installed on the three-dimensional movable bracket, and the second reflector corresponds to the lens and accepts the laser beam. emit light
waves; the L-shaped fixing mechanism consists of a vertical fixing seat, a first reflector, a horizontal fixing seat and a
photomask. The table includes an X-direction shaft seat, an X-direction moving shaft, an X-direction driving mechanism, a Y-direction shaft seat, a Y-direction moving shaft, a Y-direction driving mechanism and a substrate clamp, and the position of the substrate clamp is lower than the horizontal fixed seat. The invention makes the
exposure system more stable.