This invention provides a thin film preparation
system and its control method based on a formula
language model-driven enclosed intelligent
robot box. The thin film preparation
system includes: a
robot hardware execution device comprising a consumable storage mechanism, a gantry
transfer mechanism, a capping and clamping mechanism, a
spin coating mechanism, a vacuum-induced
crystallization mechanism, an annealing mechanism, and an in-situ spectral detection mechanism; an intelligent cognitive device deploying a formula domain vertical model, a language
intelligent agent module, a literature learning closed-loop module, and an experimental learning closed-loop module, wherein the language
intelligent agent module is configured to coordinate the data interaction between the literature learning closed-loop module and the experimental learning closed-loop module; and an
intelligent agent isolation device that, after confirming that the recommended formula instructions conform to physical
boundary constraints, parses them into low-level control instructions and sends them to the
robot hardware execution device. This invention achieves autonomous acquisition and transformation of formula knowledge, secure
verification of semantic instructions, and self-evolution of underlying mechanisms and self-optimization of formulas during the thin film preparation process.