The utility model relates to
semiconductor ion implantation equipment technical field, and disclose a kind of multi-functional high-efficiency
boron fluoride ion implantation chamber, including support connecting mechanism, sealing
assembly, support connecting mechanism contains chamber main body, internal injection component, multifunctional component
assembly interface, upper sealing ring
assembly groove, side sealing ring assembly groove, top connecting hole, top auxiliary sealing ring assembly groove, side fixed base, assembly interface sealing ring assembly groove, through slot,
toughened glass sheet.The utility model is through the curved surface gradual change flow guide structure of internal injection component,
boron fluoride ion distribution in chamber is accurately controlled,
ion distribution uniformity is significantly improved, guarantee
semiconductor material
doping consistency, effectively improve device manufacturing yield, adapt high-precision
semiconductor process demand.