36results about How to "Eliminate particles" patented technology

A method for fabricating a CMOS integrated circuit (IC) includes providing a substrate having a semiconductor surface, wherein the semiconductor surface has PMOS regions for PMOS devices and NMOS regions for NMOS devices. A gate dielectric layer is formed on the semiconductor surface followed by forming at least a first metal including layer on the gate dielectric layer. A polysilicon or amorphous silicon layer is formed on the first metal including layer to form an intermediate gate electrode stack. A masking pattern is formed on the intermediate gate electrode stack. The polysilicon or amorphous silicon layer is dry etched using the masking pattern to define a patterned intermediate gate electrode stack over the NMOS or PMOS regions, wherein the dry etching stops on a portion of the first metal comprising layer. The masking pattern is removed using a first post etch clean for stripping the masking pattern. A multi-step solution cleaning sequence is used after the removing step and includes a first wet clean including sulfuric acid and a fluoride, and a second wet clean after the first wet clean including a fluoride. Fabrication of the IC is then completed.

The technical scheme of the invention discloses a cleaning and sweeping device and a method and mechanical arm for cleaning and sweeping a wafer. The cleaning and sweeping device comprises sucking parts and a cleaning and sweeping mechanism; the sucking parts are used for being sucked under a grasping part of the mechanical arm; the cleaning and sweeping mechanism includes a support part, air inlets and cleaning and sweeping holes, the support part supports the sucking parts, and the cleaning and sweeping holes are communicated with the air inlets; the cleaning and sweeping holes are used forpurging the back side of an object when the grasping part of the mechanical arm grasps the object. According to the technical scheme, cleaning and sweeping can be achieved in the process of conveyingthe object, not only is excessive cleaning and sweeping time not required to be add, but also pollution particles on the back side of the object can be reduced, cross-contamination between process equipment caused by particulate matter and process defects are prevented, and therefore the production yield of the wafer is improved.

The invention provides a camera control method and a mobile terminal, and relates to the technical field of mobile communication. The method is applied to the mobile terminal. The mobile terminal comprises a camera assembly. The camera assembly comprises a lens and a motor. The method comprises the following steps: detecting whether movement data of the mobile terminal meets preset violent movement conditions; if detecting that the movement data meets the preset violent movement conditions, determining motor driving parameters according to the detected movement data; and based on the motor driving parameters, controlling the motor to drive the lens to move, wherein the movement data comprises acceleration speed of the mobile terminal when translating along at least one preset direction and/or angular speed of the mobile terminal when rotating with the at least one preset direction being a rotation center axis, the acceleration speed being vector data and the angular speed being vector data. The method solves the problem that when the mobile terminal is in violent movement, the lens can get damaged since the lens is easy to collide with other devices inside the camera.

A bag filtration element and system for its installation in a forced air furnace where the filtration element includes a channel element frame that receives rectangular bag frames fitted thereto that each received an open bag neck end fitted thereto, and the rectangular bag frames are fitted side by side into the channel element frame, whose upper end closes the frame into a rectangle, and, the bag ends are folded around the bag frames sides and connected. A rectangular opening is formed into the plenum of a furnace inlet air duct to extend, at an upward angle, across the rectangular opening, between opposing inner walls of the air duct, and a door is provides for positioning over the duct rectangular opening with the bag filtration element installed therein.

An airbag assembly may include an airbag and an inflator in fluid communication with the airbag. The inflator may have a gas source chamber containing a gas source and a centrifugal flow chamber into which the gas flows from the gas source chamber through a centrifugal flow barrier. As the gas moves through the centrifugal flow barrier, it may be urged to move along a pathway that encircles at least a part of a longitudinal axis of the inflator. The gas may then move toward the longitudinal axis to flow through an orifice of an inward flow barrier. this inward flow may occur at a velocity that is generally too large for entrained particulates. Thus, such particulates may remain in the centrifugal flow chamber. The gas may flow from the orifice into a plenum chamber that releases the gas to the airbag via a plurality of apertures.

The invention relates to a thin film and especially relates to a high-light-transmittance EVA thin film which is prepared from, by mass, 50-70 parts of ethylene-vinyl acetate based copolymer, 10-18 parts of an antioxidant, 2-4 parts of dihydric alcohol, 1-3 parts of a brightening agent, 20-25 parts of an ultraviolet absorbent, and 3-6 parts of a compatibilizer. By means of the technical scheme, the EVA thin film has high light transmittance, is free of particles, can prevent yellowing and has anti-aging effect.

A filter device includes a filter housing (10) in which at least two filter elements (12, 14) with differing filter grades of filter material (16) are arranged. The filter elements are partially separated from each other by a separating device (18), with a through channel (24) of predetermined cross-section for a hydraulic connection between neighboring filter chambers (20, 22),. The filter chambers arranged prior to the filter materials (16) in the flow direction of the fluids for filtering. The filter device permits a combination of main- and side-stream filters in the smallest possible space, whereby very good purity levels for the filtered fluid are nevertheless achieved.

The invention provides a manufacturing method of a schottky diode with high performance; the manufacturing method comprises the following steps of: providing a semiconductor substrate, and sequentially forming a heavily doped layer and a lightly doped layer on the semiconductor substrate; depositing an insulating layer on the lightly doped layer, and forming an insulating layer window above the lightly doped layer; washing the exposed lightly doped layer by adopting a washing solution; depositing a first metal layer on the insulating layer and the lightly doped layer; alloying the first metal layer and the lightly doped layer, and forming an alloying layer between the first metal layer and the lightly doped layer; removing the first metal layer; forming an upper electrode on the alloying layer, wherein the washing solution mainly comprises the following components in percent by weight: 65-75% of phosphoric acid, 5-15% of acetic acid, 1-5% of fluoboric acid and 1-5% of nitric acid. According to the manufacturing method, before the first metal layer of the schottky diode is deposited, the specific washing solution is used for washing and slightly corroding the lightly doped layer so that particles, stains and interface detects remained on the surface are eliminated, a contact junction of a metal semiconductor becomes better, thereby the schottky diode has more efficient and stable performance.

A fluid filter media including a first media layer, a second media layer, a filter layer disposed between the first media layer and the second media layer, and a plurality of spaced apart weld points that couple the first media layer, the filter layer, and the second media layer together, where the weld points distort the surface of the first media layer and the second media layer, the fluid filter media is folded back on itself to form a plurality of pleats, and the surface distortions permit fluid flow through the fluid filter media when adjacent surfaces of the fluid filter media touch.

The invention discloses an inorganic high-performance thin-wall sound barrier for transportation, which comprises a plurality of columns and a plurality of wallboards which are arranged between every two adjacent columns and connected in an up-and-down way, wherein the topmost wallboard is provided with a capping; and the wallboard and capping are cast from the following raw materials in parts by weight: 350-500 parts of cement with the average grain size of 30-60 mu m and the grade of not lower than 42.5, 200-300 parts of active admixture with the average grain size of 0.1-10 mu m and the SiO2 content of at least 85%, 1400-1600 parts of river sand aggregate with the particle size of 0.16-0.63mm, 12-16 parts of high efficiency water reducing agent with the water reducing rate of greater than 30%, 110-160 parts of water, 10 parts of PVA (polyvinyl alcohol) fiber with the length of 8-12mm and 30 parts of basalt fiber with the length of 10-14mm. The inorganic high-performance thin-wall sound barrier for transportation has the advantages of light structural weight, small wall thickness (only 25-45mm), and obvious sound insulation and noise reduction effects. The sound reduction index is 30db or above, and exceeds the urban noise reduction standard requirement.

The present invention relates to an exposure mask for structuring a photoresist layer on a substrate wafer, in which an inorganic adhesive is used as an adhesive device for connecting a reticle having a lithographic structure, a frame and a pellicle. For chemical reasons, an adhesive of this type has no tendency or a considerably lower tendency to gassing out than an organic adhesive used in conventional exposure masks, so that the risk of particles which are deposited on the lithographic structure and which can cause projection errors during an exposure process is largely ruled out. The invention relates further to a method of producing such an inorganic adhesive and also a method of producing an exposure mask with the aid of such an inorganic adhesive.

The invention provides a tail gas cleaning unit for vapor deposition equipment. The unit involves an injection cavity and a filter screen structure, wherein the injection cavity comprises an outer side wall and an inner side wall, the inner side wall is formed into a cylindrical shape with an inner cavity, the outer side wall is arranged around the inner side wall and is separated from the inner side wall, an injection hole penetrating through the inner side wall in the thickness direction of the inner side wall is formed in the inner side wall, a fluid inlet penetrating through the outer sidewall in the thickness direction of the outer side wall is formed in the outer side wall so that a fluid flowing into an opening of one end of the inner cavity defined by the inner side wall can flowout from an opening of the other end of the inner cavity defined by the inner side wall through the filter screen structure. The invention further provides a tail gas cleaning device and the vapor deposition equipment. According to the vapor deposition equipment, few residual particles or even no residual particles exist in a tail gas treatment pipeline device so that the maintenance period of a vacuum pump can be prolonged.

A method for post-processing part obtained by additive manufacturing through sintering of a plastic powder, in order to remove particles detached from the part or partially sintered, the method including, consecutively, stripping (S1) and ionizing blowing (S2). Such a method makes it possible to remove particles having a largest dimension greater than a given dimension. The invention also relates to a corresponding manufacturing method of a plastic material part, and to a corresponding production method.

The invention provides a water filtration haze removal device. The water filtration haze removal device comprises a water storage tank body, a filtration mechanism, an air blowing mechanism and an upper cover; the upper cover covers the water storage tank body and is provided with a purified air outlet; the filtration mechanism is arranged at the bottom of the water storage tank body and immersedin water; the filtration mechanism comprises a microporous rubber pipe and an air distribution cylinder, a large number of fine vent holes are formed in the periphery of the pipe wall of the microporous rubber pipe, the side wall of the air distribution cylinder is connected with a plurality of microporous rubber pipes through connectors, and the microporous rubber pipes are integrally fixed to the bottom of the water storage tank body through a rubber pipe fixing frame; and the air distribution cylinder is connected with an air supply pipe, the air supply pipe penetrates through the upper cover to be in sealed connection with the air blowing mechanism, the air blowing mechanism is in sealed connection with an exhaust pipe, and one end of the exhaust pipe is a free end and placed in air. Haze air is conveyed into the pipe cavity of the rubber pipe immersed in water through the pipeline and then discharged into the water through the holes of 30-50 microns to form tiny bubbles, and hazeparticles in the bubbles make full contact with the water and are absorbed by the water, so that the effect of refining the haze air is achieved.

The invention discloses a rubber paste material of a rubber roller and a preparation method of the rubber paste material and belongs to the field of rubber preparation. The rubber paste material is prepared from the following specific components in percentage by mass: 45 to 58 percent of raw nitrile butadiene rubber, 30 to 35 percent of carbon black, 1.5 to 2.5 percent of a plasticizer, 1 to 2 percent of a bonding agent, 4 to 7.2 percent of liquid nitrile butadiene, 0.2 to 0.4 percent of an accelerator, 3.5 to 4.5 percent of sulfur, 0.2 to 0.4 percent of stearic acid, 1 to 2 percent of zinc oxide and 0.6 to 1.0 percent of an anti-ageing agent. The preparation method comprises the following preparation steps: mixing master batch; carrying out two-section vulcanization on the master batch; preparing rubber paste; immersing the rubber paste; stirring the rubber paste; diluting the rubber paste to obtain a finished product. The rubber paste material of the rubber roller, provided by the invention, has the characteristics of good flowability and great viscosity at room temperature; a sticky roller core, and the nitrile butadiene rubber or a sticky nitrile butadiene rubber layer are densely molded; in a vulcanization process, crosslinking is carried out, so that the bonding strength between the roller core and the nitrile butadiene rubber is improved and the utilization period of therubber roller is prolonged.

The invention relates to the technical field of size measurement, and provides a soft object measuring device for preventing extrusion damage by using light outage. The device comprises a machine body, a threaded rod is movably connected with the inner wall of the machine body, a threaded sleeve is movably connected with the outer wall of the threaded rod, and a support frame is fixedly connectedwith the outer wall of the threaded sleeve. According to the soft object measuring device for preventing extrusion damage by using light outage, the support frame drives a connecting rod to get closeto a soft object, the connecting rod and a base plate slowly move to get close to the soft object, and when the base plate makes contact with the soft object, a photoresistor in the base plate cannotmake contact with the light, and the resistance value is increased; when the resistance value of the photoresistor is increased, a clamping block limits movement of the connecting rod, all the photoresistors are not irradiated by light, a driving mechanism stops, the size of a size meter plate on the outer wall of a lever blocked by a blocking block is the average value of the thickness of the soft object, and errors caused by deformation of the soft object are prevented by measuring the thickness through light blocking outage.