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33results about How to "High heating reliability" patented technology

Control method and control device of electric oven and electric oven

The invention discloses a control method and a control device of an electric oven and the electric oven. The method comprises the following steps: when the electric oven heats to a preset target temperature under a heating mode, stopping heating; determining a heating duty ratio of the heating mode within a preset heating cycle, wherein the heating cycle includes the heating mode and a temperature maintaining mode after stopping heating; and conducting heating by virtue of the electric oven in accordance with the heating duty ratio. The scheme disclosed by the invention can overcome shortcomings of the prior art which is uneven in temperature, low in reliability, poor in user experience and the like, and the beneficial effects of uniform temperature, high reliability and good user experience can be achieved.
Owner:GREE ELECTRIC APPLIANCES INC

Large-diameter hot water pipe non-compensation direct-burried laying method

The invention relates to a large-caliber hot water pipeline uncompensated direct burying method which comprises the following steps: (1) the temperature of media supplying heat and pressure in a pipeline are set in a certain range; (2) the depth of the direct burying of the pipeline is determined by a burying path, and a groove is excavated; (3) the bottom of the groove is tamped and leveled; (4) insulating tubes are processed, prefabricated and directly buried in a factory; (5) the prefabricated and directly buried insulating tubes are placed into the groove; (6) all prefabricated and directly buried insulating tubes are mutually connected, a compensator does not need mounting in fixed space; (7) the groove is backfilled at environmental temperature, and the pipeline does not need preheating before backfilling. The pipeline burying method is simple, and the pipeline does not need being mounted with a compensator in fixed space to absorb expansion with heat and contraction with cold caused by the temperature rise of hot water. The invention reduces the accident potential of a heat supply pipe network, and has the advantages of low daily maintenance work load, waterproof performance, good anticorrosion performance, low heat loss, long service life, short construction period and low construction investment. The invention is applicable to burying pipelines with the nominal diameter of DN600-DN1200.
Owner:BEIJING GAS & HEATING ENG DESIGN INST

Electromagnetic heating curing and forming device and method for preparing filament wound composite material pipe body by using electromagnetic heating curing and forming device

The invention provides an electromagnetic heating curing and forming device and a method for preparing a filament wound composite material pipe body by using the electromagnetic heating curing and forming device, and relates to a heating and curing device and a method for preparing the composite material pipe body by using the heating and curing device. The invention aims to solve the problems of an existing heating and curing device for preparing the composite material pipe body that a heat source of an inner heating and curing core die cannot be obtained easily, the heating efficiency is low, and the heating precision and the heating uniformity are poor. The device comprises an electromagnetic heating coil, an electromagnetic heating power supply, a temperature sensor, heat pipes, a heat conducting medium, a sprayer, a cooling liquid protection cover, a cooling liquid tank, a water pump, a heat radiator and a core die, wherein an interlayer is formed between the outer wall of an inner pipe and the inner wall of an outer wall of the core die; a heat pipe array is distributed in the heat conducting medium in the interlayer; and the electromagnetic heating coil is uniformly arranged outside the tail end of the core die. The method comprises the following steps: the core die is fixed on a main shaft of a winding machine; and the core die is heated and cured simultaneously when being wound, and then heated, cured, and the processed core die is cooled. The electromagnetic heating curing and forming device can be obtained.
Owner:鑫捷瑞泰安复合材料科技有限公司

Optimal scheduling method and device for heat accumulating type electric heating system

The invention provides an optimal scheduling method and device for a heat accumulating type electric heating system, and relates to the field of heat accumulating type electric heating, and the methodcomprises the steps: building a building heat load model, heat accumulating type electric heating equipment and a system model; constructing an electric heating system power prediction model based onthe influence factors; based on the building heat load model, the heat accumulating type electric heating equipment model, the system model and the electric heating system power prediction model, establishing constraint conditions of the heat accumulating type electric heating system in the operation period; constructing a heat accumulation type electric heating optimal scheduling model based onthe constraint conditions, determining a scheduling mode according to the heat accumulation type electric heating optimal scheduling model, and effectively improving the operation safety of the powerdistribution network and the heating reliability of a user by utilizing the heat accumulation capacity of heat accumulation type electric heating on the premise of considering the power constraint ofthe power distribution network.
Owner:STATE GRID ENERGY RES INST +2

Portable nasal cavity cleaning device for pediatric nursing

InactiveCN108210308AAvoid risk of aspiration into lungsAutomate the processBathing devicesNasal cavityPediatric nursing
The invention discloses a portable nasal cavity cleaning device for pediatric nursing. The nasal cavity cleaning device comprises a device body, a controller, a built-in power supply, a syringe, a micro motor, a liquid guide tube and a cleaning head. Through coordinated linkage of the syringe, the micro motor and the liquid guide tube, the micro motor drives the liquid guide tube to rotate, so thecleaning head can clean the nasal cavity through bristles, cleaning liquid can be safely and reliably injected into the nasal cavity through the syringe for further cleaning, and thus the effect andreliability of nasal cavity nursing are greatly improved; besides, a heating jacket is arranged in the device body, so the cleaning liquid in the syringe can be kept at a suitable use temperature, therejection reaction of the nasal cavity is relieved, and the use experience is improved; moreover, the nasal cavity cleaning device is compact in structure, small in size, suitable for carrying, low in use environment requirement and convenient to use for home life or medical institutions.
Owner:张洪娟

Integrated generator for screed plate heat up

A paving machine for laying a mat of paving material on a paving surface includes a generator, such as a switched reluctance generator, integrally installed with a pump drive and operatively connected to an output shaft of a power source of the paving machine. The generator outputs AC power to a power converter that in turn outputs DC power for a plurality of screed heating elements to produce heat to warm a screed. The paving machine may also include an insulation monitoring system for determining the occurrences of ground faults in the electrical components by comparing current levels in the components to a predetermined maximum current level. A controller of the paving machine may monitor the temperature of the generator and produce the speed of the power source to prevent overheating.
Owner:CATERPILLAR PAVING PROD INC

Solar coupled air source heat pump system

The invention discloses a solar coupled air source heat pump system. The system mainly comprises a solar heat collector, an air preheater, an evaporator, a compressor, a condenser, an expansion valve, an electric heating auxiliary water storage tank, a thermal insulation material, hot water for a user, return water, a circulating water pump and an electromagnetic valve, wherein the upper end is connected with the air preheater and the lower end is connected with the circulating water pump after the solar heat collector is connected in series with the electromagnetic valve and then connected in parallel with the electromagnetic valve; after the electric heating auxiliary water storage tank is connected in parallel with the electromagnetic valve, the upper end is connected with the air preheater, and the lower end is connected with the electromagnetic valve; the electromagnetic valve is connected with the circulating water pump; the thermal insulation material is coated on the outer side of the air preheater; the evaporator is arranged on the right side of the air preheater; the upper end of the evaporator is connected with the compressor, and the lower end of the evaporator is connected with the expansion valve; the left upper end and the left lower end of the condenser are connected with the compressor and the expansion valve respectively; the return water is connected with the circulating water pump; the circulating water pump is connected with the right lower end of the condenser; the hot water for the user is led out from the right upper end of the condenser. The system has the complementary advantages of solar energy and air heat energy, and the heating reliability of the system is improved.
Owner:JIANGSU SUNCHI NEW ENERGY

Multi-mode water-circulation multi-split air-conditioning system

The invention relates to the technical field of air conditioners, and provides a multi-mode water-circulation multi-split air-conditioning system. The multi-mode water-circulation multi-split air-conditioning system comprises a plurality of air-conditioner units, a second circulating pump, a stop valve and a natural energy acquisition device. Each air-conditioner unit comprises a plurality of indoor heat exchangers. The indoor heat exchangers of each air-conditioner unit are three-medium heat exchangers each provided with an indoor first medium channel and an indoor second medium channel. Thefirst ends of all the indoor second medium channels communicate with a first main pipe, and the second ends of all the indoor second medium channels communicate with a second main pipe. An outlet of the natural energy acquisition device communicates with the first main pipe through a first circulating pump, and an inlet of the natural energy acquisition device communicates with the second main pipe. An inlet of the second circulating pump communicates with the first main pipe, and an outlet of the second circulating pump communicates with the second main pipe. The stop valve is arranged on thefirst main pipe. An outlet of the first circulating pump is located in the inlet side of the stop valve, and the inlet of the second circulating pump and the first end of all the indoor second mediumchannels are located on the outlet side of the stop valve. According to the multi-mode water-circulation multi-split air-conditioning system, the air-conditioner units can stably and efficiently operate all year round.
Owner:TSINGHUA UNIV

Heating circuit of heat energy device and intelligent multifunctional electric heating table

The invention discloses a heating circuit of a heat energy device and an intelligent multifunctional electric heating table. The heating circuit comprises a high-frequency filter circuit connected with a secondary side of a high-voltage transformer, and the high-frequency filter circuit is connected with a low-frequency filter circuit connected with a power adjustment circuit. The electric heating table comprises a base and a tabletop, four support stands are arranged between the base and the tabletop, and the heating circuit is mounted in the electric heating table. A display screen is mounted on the upper surface of the tabletop, a WIFI receiving amplifier is fixed on the lower surface of the tabletop, sound boxes are fixed on the lateral sides of the tabletop, foot massagers are mounted on the four sides of the base, and an ultrasonic humidifier is mounted in the middle of the base. By adopting the two-stage filter structure, a damping resistor is added into the heating circuit, electromagnetic interference can be effectively suppressed, and noise can be effectively filtered. The electric heating table is complete in function and highly practical.
Owner:CHANGSHA BAOZHEN ELECTRICAL APPLIANCE

Control method and device for preventing cookware from dry burning, and induction cooker

The invention discloses a control method and device for preventing cookware from dry burning, and an induction cooker. The method comprises the following steps: S1, obtaining current heating power ofthe induction cooker and judging whether the current heating power of the induction cooker is greater than preset heating power; S2, if yes, further judging whether the cookware is special cookware; S3, if yes, collecting current working current I, current power level P and current IGBT conduction pulse width T of the induction cooker at every preset time; S4, comparing the I, P and T collected each time with the previously collected current working current I', the current power level P' and the current IGBT conduction pulse width T' of the induction cooker so as to judge whether the cookwareis currently in a dry burning state; S5, if yes, controlling the induction cooker to stop heating. Thereby, the dry burning protection function required for special cookware can be provided, thereby improving the heating reliability; the structure is simple, the universality is strong, and the cost is low.
Owner:FOSHAN SHUNDE MIDEA ELECTRICAL HEATING APPLIANCES MFG CO LTD

Interconnection and mutual backup heat supply system and method capable of realizing shutdown without boiler shutdown

PendingCN113357690AHigh heating reliabilitySolve the problem that it is difficult to guarantee the heat supplyLighting and heating apparatusSpace heating and ventilation detailsControl engineeringProcess engineering
The invention discloses an interconnection and mutual backup heat supply system and method capable of realizing shutdown without boiler shutdown. The heat supply system comprises a first unit and a second unit which communicate with each other through a valve, and each of the first unit and the second unit comprises a boiler, a steam turbine high-pressure cylinder, a steam turbine medium-pressure cylinder, a heat supply network heater, a heat supply network drainage pump and a pipeline valve system. Under the condition that a steam turbine of a single unit breaks down, the high bypass valve and the low bypass valve are adopted for reducing pressure and temperature, the heat supply requirement is met, and the 100% heat load can be met; when the single unit is overhauled and shut down, if a steam turbine and the heat supply network heater of the other unit break down, the valve for communicating the first unit and the second unit can be opened, the heat supply network heater of the shut-down unit is used for supplying heat, and the requirement for 60% of the heat load can be met. The two units communicate with each other to form the interconnection and mutual backup heat supply system, and the overall heat supply reliability of the heat supply system is improved.
Owner:CHINA ENERGY CONSTR GRP SHAANXI ELECTRIC POWER DESIGN INST CO LTD

Cascade heat accumulating and supplying system and method

The invention discloses a cascade heat accumulating and supplying system. The cascade heat accumulating and supplying system comprises a cascade heat-exchanging loop and a heat-supplying loop, whereinthe cascade heat-exchanging loop is composed of a cascade heat-exchanging circulating pump, a high-temperature heat-accumulating module and a transitional constant-current heat accumulating and exchanging module which are sequentially connected through a cascade heat-exchanging circulating pipeline, and the heat-supplying loop is composed of the transitional constant-current heat accumulating andexchanging module and a heat-supplying circulating pump which are sequentially connected through a heat-supplying pipeline; the high-temperature heat-accumulating module comprises a high-temperatureheat accumulator which is internally provided with a heat-exchanging pipeline; both the inlet end and the outlet end of the heat-exchanging pipeline are connected with the cascade heat-exchanging circulating pipeline; the transitional constant-current heat accumulating and exchanging module comprises a medium-and-low-temperature phase-change heat accumulator which is internally provided with a plurality of heating heat-exchanging pipes and heat-releasing heat-exchanging pipes, and both the inlet ends and the outlet ends of the heating heat-exchanging pipes are connected with the cascade heat-exchanging circulating pipeline; both the inlet ends and the outlet ends of the heat-releasing heat-exchanging pipes are connected with the heat-supplying pipeline; and circulating heat transfer substances are arranged in the cascade heat-exchanging circulating pipeline and the heat-supplying pipeline correspondingly, and heat using equipment is arranged between the transitional constant-current heat accumulating and exchanging module and the heat-supplying circulating pump. The cascade heat accumulating and supplying system is large in heat accumulation amount and stable in power supplying.
Owner:BEIJING HTN PIPELINE EQUIP

Complementary type multi-energy family heating system

The invention discloses a complementary type multi-energy family heating system which comprises a user terminal, a heating system, a floor heating system, a control management platform, a gas heater,a solar light panel module, a water tank and an air source heat pump module. The water tank is connected with a water inlet pipe, the water outlet end of the water tank is connected with the water inlet end of the gas heater of a fuel gas instant water heater, the water outlet end of the water tank is connected with the water inlet end of the heating system, the water inlet end of the floor heating system and the user terminal, the water outlet end of the heating system and the water outlet end of the floor heating system are connected with the water tank, and the complementary type multi-energy family heating system further comprises the solar light panel module and the air source heat pump module. The complementary type multi-energy family heating system has the beneficial effects that the heating condition of various clean energy resources can be reasonably monitored and controlled, respective advantages are developed, and the heating efficiency is maximized; and meanwhile, the reasonable control strategy is used, advantages are used and disadvantages are omitted in cooperation with different weather situations in actual life, and the maximum potential of the heating system is developed.
Owner:合肥汇英科技有限公司

Robust optimization scheduling method for regional integrated energy system

The invention discloses a robust optimization scheduling method for a regional integrated energy system, and belongs to the related technical field of regional integrated energy system scheduling, and the method comprises the specific steps: constructing a partial load performance function of the efficiency of each energy conversion device; constructing a regional comprehensive energy system model; constructing constraint conditions of the regional integrated energy system; constructing an optimal scheduling model; constructing a robust optimization scheduling model, and solving the robust optimization scheduling model to obtain an optimal scheduling scheme of the regional integrated energy system; and performing optimal scheduling on the regional integrated energy system according to the optimal scheduling scheme. According to the method, the box type uncertain set is adopted to effectively describe the fitting error and the range of the partial load performance function of the equipment, the the fitting error and the range of the partial load performance function of the equipment are applied to the optimization model, the system scheduling scheme is changed, the system operation robustness is improved, and the heat supply reliability is improved.
Owner:CHANGSHA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Heating control method and device and wall-hanging stove system

The invention relates to a heating control method and device and a wall-hanging stove system. When heating control is carried out at a heating area, a user only needs to input the target temperature of the current heating area at a control terminal corresponding to the heating area, the target temperature and the actual temperature of the heating area can be combined, and heating control over all the heating areas can be achieved. And finally, the actual temperature of each heating area reaches the target temperature. By means of the scheme, the user can set the target temperature without going to a wall-hanging stove, and operation is convenient. Meanwhile, when the wall-hanging stove conducts heating control over the heating areas, control is conducted in combination with the target temperature and the actual temperature of each heating area so that the actual temperatures of the heating areas can be better matched with the target temperature, and the heating reliability is high.
Owner:GREE ELECTRIC APPLIANCES INC

Multi-mode heat supply unit load distribution optimization method based on artificial neural network

The invention discloses a multi-mode heat supply unit load distribution optimization method based on an artificial neural network, and the method comprises the following steps: S1, building a database, and storing unit operation data and accessed meteorological data; S2, building a BP artificial neural network model, calling data in the database as input data of the BP artificial neural network model, and predicting the heat supply load and the power supply load of a unit in the next 24 hours. The invention provides a multi-mode heat supply unit load distribution optimization method based on an artificial neural network. According to the method, a future load is predicted based on meteorological information and a historical load of a power plant; pre-adjustment and pre-planning scheme making are performed on the power plant according to the predicted load; reasonable load distribution is carried out on power plant units according to an MEGC instruction and the predicted load; and according to the predicted load, the power plant is guided to make a decision, determine whether to participate in peak regulation bidding of the second day and determine the bidding price.
Owner:ZHEJIANG UNIV

Planar quick-start heater assembly and preparation method thereof

The invention discloses a planar quick-start heater assembly and a preparation method thereof. The planar quick-start heater assembly comprises a hot wire body and a hot wire cylinder. The hot wire body comprises a hot wire and hot wire legs arranged at two ends of the hot wire. Corundum micro-powder slurry is poured into the hot wire cylinder, the hot wire is of a planar e-shaped structure, and springs are closely wound on the hot wire legs. The preparation method comprises the following steps: (a) winding a single-spiral hot wire blank; (b) pressing the blank into a flat shape; (c) winding the hot wire blank into a hot wire with a planar e-shaped structure to obtain the hot wire body; (d) carrying out shaping in a hydrogen furnace; (e) removing core wires by corrosion; (f) attaching an insulating layer to the surface of the hot wire through an electrophoresis method; and (g) combining the hot wire body and the hot wire cylinder, and pouring the corundum micro-powder slurry to form the assembly. According to the miniaturized planar e-shaped structure hot wire structure, the cross sectional area of the heating body is increased, the heat transfer path is shortened, the bending angle is small, and the heating efficiency and reliability of the assembly are improved; and the invention can be applied to the quick-start heater assembly for the traveling-wave tube.
Owner:NANJING SANLE GROUP

Electric heating device capable of uniformly and intensively heating

An electric heating device capable of heating uniformly and intensively comprises a metal shell and a connector, one end of the metal shell is sealed, the other end of the metal shell is fixedly connected with the connector, a wiring terminal is arranged at the upper end of the connector, and a metal heat collection core rod extending axially is arranged in the metal shell. An armored heating cable is wound on the outer circumference of the metal heat collection core rod in a double-spiral shape, heat conduction powder is filled in a gap space between the metal heat collection core rod and the metal shell, an electric heating alloy wire in the armored heating cable extends into a connector cavity to be fixedly connected with a wiring terminal, and the connector cavity is filled with an insulating material. Heat is concentrated, heating is uniform, and reliability is high.
Owner:CHONGQING MATERIALS RES INST

Renewable energy source heat supply monitoring technique

The invention relates to a renewable energy source heat supply monitoring technique which comprises a control system, an intelligent chip and a heat supply system, wherein the control system comprises a man-machine interaction module, a wireless communication module, an alarm indication module and an emergent situation artificial processing module; the man-machine interaction module is arranged above the intelligent chip and is connected with the intelligent chip; the wireless communication module is arranged above the intelligent chip and is connected with the intelligent chip; the alarm indication module and the emergent situation artificial processing module are respectively connected with the intelligent chip; the heat supply system comprises a solar heat supply system arranged below the intelligent chip, a wind power generator arranged below the intelligent chip, an air energy heat pump water heater arranged below the intelligent chip, and a biogas water heater arranged below the intelligent chip.
Owner:SHANGHAI DIANJI UNIV

Defrost control method, device, system and air conditioner for temperature regulating equipment

The invention relates to a defrosting control method, device and system of temperature adjusting equipment and an air conditioner. The method comprises the following steps: first images sent by a first image acquiring device and second images sent by a second image acquiring device are obtained, wherein the first images and the second images are images acquired in the same position of a heat exchanger of the temperature adjusting equipment; a first frosting degree and a second frosting degree are analyzed according to the first images and the second images; a defrosting control instruction issent according to the first frosting degree, the second frosting degree and a preset threshold; and the defrosting control instruction is used for controlling defrosting modes of the temperature adjusting temperature. The double image acquiring devices acquire the images in the same position of the heat exchanger, and the preset threshold is combined to perform the defrosting control according tothe frosting degree under the precondition that the image acquiring devices can normally acquire the images, so that the frosting judgment accuracy can be improved, the abnormal defrosting cannot be generated by damage of one image acquiring device, and the heating reliability is high.
Owner:GREE ELECTRIC APPLIANCES INC

Stainless steel wrapping and heating device

The invention discloses a stainless steel wrapping and heating device which is connected with a transformer. The stainless steel wrapping and heating device comprises a cable, a composite insulating layer, a mica tape and a stainless steel wrapping pipe. The cable is connected with a transformer, and is used for transmitting current provided by the transformer. The composite insulating layer wrapsthe outer wall of the cable. The mica tape wraps the outer wall of the composite insulating layer. The stainless steel wrapping pipe sleeves the mica tape, and the tail end of the stainless steel wrapping pipe is connected with the tail end of the cable. When a current flows through the cable, the current passes through the connecting part of the tail end of the cable and the tail end of the stainless steel wrapping pipe and then flows back to the transformer through the stainless steel wrapping pipe. In the process, the current is affected by the skin effect and the proximity effect and passes through the inner surface layer of the stainless steel wrapping pipe in a concentrated mode, and the purpose of improving the heating efficiency of the device is achieved in cooperation with the composite insulating layer and the mica tape.
Owner:大庆科莱德石油技术开发有限公司

Cascade thermal storage heating system and method

The invention discloses a cascade heat storage heat supply system, which comprises a cascade heat exchange circuit composed of a cascade heat exchange circulation pump, a high temperature heat storage module, and a transitional steady flow heat storage heat exchange module connected sequentially through a cascade heat exchange circulation pipeline and A heat supply circuit composed of a transitional steady flow heat storage heat exchange module and a heat supply circulation pump connected in sequence through the heat supply pipeline, the high temperature heat storage module includes a high temperature heat storage body with a heat exchange pipeline inside, and the heat exchange pipeline Both the inlet and outlet ends are connected to the cascade heat exchange circulation pipeline. The transitional steady flow heat storage heat exchange module includes a medium and low temperature phase change heat storage body with a plurality of heating heat exchange tubes and heat release heat exchange tubes inside. Both the inlet and outlet ends are connected to the cascade heat exchange circulation pipes; the inlet and outlet ends of the exothermic heat exchange pipes are connected to the heat supply pipes; both the cascade heat exchange circulation pipes and the heat supply pipes are equipped with circulating heat transfer materials, and the transition is stable. A heat utilization device is arranged between the heat storage heat exchange module and the heat supply circulation pump. The invention has large heat storage and stable heat supply.
Owner:BEIJING HTN PIPELINE EQUIP

An electromagnetic heating curing molding device and a method of using it to prepare a fiber-wound composite material pipe body

The invention provides an electromagnetic heating curing and forming device and a method for preparing a filament wound composite material pipe body by using the electromagnetic heating curing and forming device, and relates to a heating and curing device and a method for preparing the composite material pipe body by using the heating and curing device. The invention aims to solve the problems of an existing heating and curing device for preparing the composite material pipe body that a heat source of an inner heating and curing core die cannot be obtained easily, the heating efficiency is low, and the heating precision and the heating uniformity are poor. The device comprises an electromagnetic heating coil, an electromagnetic heating power supply, a temperature sensor, heat pipes, a heat conducting medium, a sprayer, a cooling liquid protection cover, a cooling liquid tank, a water pump, a heat radiator and a core die, wherein an interlayer is formed between the outer wall of an inner pipe and the inner wall of an outer wall of the core die; a heat pipe array is distributed in the heat conducting medium in the interlayer; and the electromagnetic heating coil is uniformly arranged outside the tail end of the core die. The method comprises the following steps: the core die is fixed on a main shaft of a winding machine; and the core die is heated and cured simultaneously when being wound, and then heated, cured, and the processed core die is cooled. The electromagnetic heating curing and forming device can be obtained.
Owner:鑫捷瑞泰安复合材料科技有限公司

PVD equipment process control method and PVD equipment process control device

The invention discloses a PVD (physical vapor deposition) equipment and process control method and device. The PVD equipment and process control method comprises the following steps of: (1) controlling a heating device to heat a reaction chamber with a first set power; (2) detecting the temperature of the reaction chamber to obtain the current temperature of the reaction chamber; (3) judging whether the current temperature of the reaction chamber is higher than a first set temperature or not, implementing the step (4) if the current temperature of the reaction chamber is higher than the first set temperature, and repeating the step (1) if the current temperature of the reaction chamber is not higher than the first set temperature; (4) controlling the heating device to heat the reaction chamber with a second set power, and implementing the step (5); and (5) judging whether the current temperature of the reaction chamber is higher than a second set temperature or not, repeating the step (1) if the current temperature of the reaction chamber is higher than the second set temperature, and repeating the step (4) if the current temperature of the reaction chamber is not higher than the second set temperature. Due to the adoption of the technical scheme, the frequent starting and opening of the heat device during heating can be avoided so that the service life of the heating device can be prolonged, and the heating efficiency and the heating reliability can be improved.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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