The present application relates to the technical field of mine sensor, in particular to a mine
wind speed and non-contact sensing bionic flexible sensor and a preparation method thereof, which mainly solves the technical problems of existing
wind speed measuring sensor, such as serious
mechanical wear, high starting
wind speed, limited measuring accuracy, and low integration degree of independent
layout and integration with
proximity detection sensor. The sensor comprises an upper
electrode layer, a
dielectric layer and a lower
electrode layer fixedly connected in sequence from top to bottom. The upper
electrode layer comprises a first substrate and flexible cilia arranged on the top surface of the first substrate. The top surface of the first substrate and the flexible cilia are collectively covered with a first conductive film. The upper electrode layer serves as a
resistance test layer to measure wind speed and as a
voltage test layer to realize non-contact
proximity detection. The lower electrode layer comprises a second substrate and a second conductive film, which serves as an excitation electrode layer to generate an excitation
electric field. The present application also provides a preparation method of the sensor. The present application integrates dual functions in a single sensor, has high integration degree, no
mechanical wear and low starting wind speed.