The invention discloses a method for monitoring ground surface settlement and deformation of separate underground spaces on line. The method comprises the following steps: (1) calculating a settlementtank curve by means of an array; (2) selecting a transverse
measurement point array on each cross section; (3) setting a longitudinal
measurement point array on each longitudinal section; (4) diggingrectangular
drill holes with certain lengths, widths and heights at the positions of the transverse
measurement point arrays and the longitudinal measurement point arrays, putting protective wells into the holes, injecting fast setting concrete into the protective wells, putting micro-electromechanical
system (MEMS) inclination angle sensing devices into the fast setting concrete; (5) enabling all the MEMS inclination angle sensing devices to automatically measure inclination angles, and sending results to a terminal by means of a network; (6) automatically receiving measured data in a
wireless way by means of the terminal, interpreting the data, and then sending the data to a tunnel cloud monitoring
server; (7) completing the functions of receiving, storing,
processing, analyzing, alarming and visualizing showing the monitored data in an on-line way by means of the
server. The monitoring method can realize intelligent measurement in the whole process, and has the advantages of high measurement accuracy and simple installation.