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High-frequency power supply structure and plasma CVD device using the same

InactiveUS7319295B2Reduced change in impedanceReflection of radio frequency powerElectric discharge tubesElectric arc lampsHigh frequency powerEngineering
A radio frequency power supply structure and a plasma CVD device comprising the same are provided in which reflection of radio frequency power at a connecting portion where an RF cable connects to an electrode is reduced so that incidence of the radio frequency power into the electrode increases. In the radio frequency power supply structure for use in a device generating plasma by charging a plate-like electrode with a radio frequency power, the radio frequency power supply structure supplying the electrode with the radio frequency power from an RF cable, the RF cable is positioned on an extended plane of a plane formed by the electrode to connect to the electrode at a connecting portion provided on an end peripheral portion of the electrode. The RF cable connects to the electrode substantially in the same plane as the plane formed by the electrode. Voltage acting after the connecting portion becomes symmetric relative to the plane formed by the electrode and the electric line of force also becomes symmetric. Thereby, change of impedance at the connecting portion is reduced, reflection of the radio frequency power at the connecting portion is reduced, incidence of the radio frequency power into the electrode increases and the efficiency of film forming and surface treatment is enhanced.
Owner:MITSUBISHI HEAVY IND LTD

Method for engine misfire detection in multi-cylinder internal combustion engines with multi-cylinder spark ignition

The invention relates to a method for detecting combustion misfires in multi-cylinder internal combustion engines having several simultaneously igniting cylinders wherein, for each crankshaft rotation, rough running values are determined by measuring segment times, the segment times including the times, which correspond to the piston movement of individual cylinders after their ignition time point, wherein the crankshaft passes through an associated circular segment angular region. A combustion misfire is determined in the affected crankshaft circular segment regions from the determined rough running values LUT for crankshaft segment regions having several simultaneously igniting cylinders via a desired value comparison to a threshold value SW2, which is lower in value than the threshold value SW1 for the misfire check in crankshaft segment regions having individually igniting cylinders. For a combustion misfire in a crankshaft segment region having simultaneously igniting cylinders causing a misfire operation in one of these cylinders, a misfire operation is caused by a suitable engine intervention and by measuring the change of the rough running values in the crankshaft segment region having the simultaneously igniting cylinders, the cylinder is determined by the engine intervention which exhibits a combustion misfire without engine intervention.
Owner:ROBERT BOSCH GMBH
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