The invention relates to a self-measurement piezoelectric stack pump, belonging to the field of micro fluid transmission and control. A valve cover is installed on a pump cover, and the pump cover is installed on a pump body. A
cantilever beam type outlet valve and a
cantilever beam type
inlet valve are stuck between the valve cover and the pump cover, and the outlet valve and the
inlet valve are formed by sticking piezoelectric films and substrates. A pump cavity membrane is in pressure
welding between the pump cover and the pump body, and a
piston and an ejecting block are respectively installed at two sides of the pump cavity membrane. The
piston, the pump cover, the outlet valve and the
inlet valve together form a pump cavity, and a bolt presses a piezoelectric stack onto the ejecting block through a torsion-proof stop dog. The piezoelectric stack, the outlet valve and the inlet valve are respectively connected with an
electrical control unit through a conductor group 1, a conductor group 2 and a conductor group 3. The self-measurement piezoelectric stack pump has the advantages that a one-way valve with a sensing function is utilized to directly measure the output pressure and flow of the
piezoelectric pump, and an additional sensor is not needed, so that the structure is simple, and the accuracy and the reliability of the measuring precision are higher; and the self-measurement piezoelectric stack pump is suitable for real-time monitoring in the pumping process of different media such as liquid, gas, gas-liquid mixtures and the like.