9results about "Pyromtery using radiometer effect" patented technology

Disclosed in the present invention is a terahertz kinetic inductance bolometer, including a superconducting thin film layer, a terahertz antenna, a cutoff layer and a Si substrate, wherein the superconducting thin film layer and the terahertz antenna are respectively deposited on the cutoff layer, and the cutoff layer is deposited on the Si substrate; the superconducting thin film layer includes a superconducting feeder line, an inter-digital capacitor and an inductor coil; the inter-digital capacitor is connected with the inductor coil in parallel to form an oscillation circuit; the terahertz antenna is adjacent to the inductor coil and is used to convert a received terahertz signal into heat so that the inductor coil produces an inductance change; a resonance frequency in the inter-digital capacitor changes through the inductance change; and the superconducting feeder line receives the varying resonance frequency, through which an light intensity of the terahertz signal can be obtained to complete the detection of the terahertz signal. The terahertz kinetic inductance bolometer can detect the terahertz signal accurately and is less affected by the temperature. The present invention also provides a preparation method of the terahertz kinetic inductance bolometer and a terahertz detection system.

The invention relates to the technical field of body temperature or heat measurement, in particular to an optical sensing-based non-contact vital sign detection system and device for an emergency ICU (intensive care unit), and the system introduces active thermal stimulation, spectrum infrared thermal response analysis, environmental factor real-time compensation and physiological thermal model fusion technologies. The accurate, stable and specific non-contact monitoring of the core body temperature and endogenous metabolic calorie of the patient is realized, the heat coupling obstacle is effectively overcome, the endogenous heat and the endogenous heat are distinguished, and the monitoring stability and precision are improved.

In a general aspect, a radiometer is disclosed that includes a vapor cell sensor. The vapor cell sensor contains a vapor and is configured to generate an optical signal in response to laser signals and thermal radiation interacting with the vapor. The vapor includes a Rydberg electronic transition that is configured to interact with the thermal radiation. The radiometer also includes a computing system having one or more processors and a memory. The memory stores instructions that, when executed by the one or more processors, are configured to perform operations that include generating, based on the optical signal, transmission data that represents the transmission of the one laser signal through the vapor. The operations also include determining, based on the transmission data, a temperature of a target body that generates the thermal radiation.

The application relates to the technical field of semiconductor detection, and provides a semiconductor temperature field detection method and device. The method comprises the following steps: point-by-point scanning of a wafer surface to obtain radiation information of each spatial position point on the wafer surface; radiation energy of different wavelengths is separated from each spatial position point in sequence according to the radiation information; radiation data of each spatial position point under multiple wavelengths is generated based on the radiation energy of each wavelength; the time sequence of the point-by-point scanning and the separation of the radiation energy of each wavelength is coordinated, so that each spatial position point matches corresponding multi-wavelength radiation data; the multi-wavelength radiation data is obtained, a radiation equation group is constructed based on the multi-wavelength radiation data of the same spatial position point, and the temperature value of each point on the wafer surface is calculated by synchronous inversion according to the radiation equation group. The application is used for the semiconductor manufacturing process, and can realize self-adaption and high-reliability non-contact detection of the surface temperature field without relying on preset parameters of emissivity.

The invention relates to the technical field of semiconductor detection, and provides a semiconductor temperature field detection method and device. The method comprises the following steps: carrying out point-by-point scanning on the surface of a wafer to obtain radiation information of each spatial position point on the surface of the wafer; sequentially separating radiation energy of different wavelengths according to the radiation information of each spatial position point; generating radiation data of each spatial position point under a plurality of wavelengths based on the radiation energy of each wavelength; coordinating the time sequence of point-by-point scanning and separation of the radiation energy of each wavelength, and enabling each spatial position point to be matched with the corresponding multi-wavelength radiation data; and acquiring multi-wavelength radiation data, constructing a radiation equation set based on the multi-wavelength radiation data of the same spatial position point, and performing synchronous inversion calculation on the temperature value of each point on the surface of the wafer according to the radiation equation set. The method is used in the semiconductor manufacturing process, and self-adaptive and high-reliability non-contact detection which does not depend on emissivity preset parameters is carried out on the surface temperature field.

A calibration device and a method for calibrating a measuring device are provided that can prevent a decrease in the calibration accuracy of a microwave radiometer. [Solution] The calibration equipment comprises a first stand 11 on which a calibration tool 10 filled with liquid nitrogen is placed, a second stand 12 on which a measuring device 21 to be calibrated is placed, and a fan 13 that blows air to the calibration tool. [Effect] By using a fan to blow air into the calibration fixture, the possibility of condensation occurring in the liquid nitrogen-filled calibration fixture can be reduced, making the calibration results less susceptible to the effects of condensation. This prevents a decrease in the calibration accuracy of the measurement device.

A calibration apparatus (101) is provided with a first frame (11) on which a calibration device (10) filled with liquid nitrogen is installed, a second frame (12) on which a measuring device to be calibrated is installed, and a fan (13) for blowing air to the calibration device (10).

In a general embodiment, a radiometer including a vapor cell sensor is disclosed. The vapor cell sensor contains vapor and is configured to generate an optical signal in response to a laser signal and thermal radiation interacting with the vapor. The vapor includes Rydberg electronic transitions configured to interact with the thermal radiation. The radiometer also includes a computing system having one or more processors and memory. The memory stores instructions configured to perform operations, when executed by one or more processors, that include generating transmission data representing the transmission of one laser signal through the vapor based on the optical signal. The operations also include determining the temperature of a target object that generates thermal radiation based on the transmission data.

Calibration equipment is easily installed. [Solution] The calibration equipment includes a first stand on which a calibration tool filled with liquid nitrogen is placed, the first stand including a plurality of receiving portions, and the first stand is removably supported at the plurality of receiving portions by a plurality of supports arranged around the measuring device to be calibrated.