The present disclosure provides a method for operating a ferroelectric
field effect transistor (FeFET) as a capacitive memory device. The method comprises connecting a source terminal and a drain terminal of the FeFET together, applying a small-
signal voltage to a gate terminal of the FeFET at zero direct-current
gate voltage, and measuring
capacitance between the gate terminal and the connected source and drain terminals to determine a
capacitance state of the FeFET. The
capacitance state corresponds to either a
high capacitance state or a low capacitance state based on polarization of a ferroelectric
gate stack of the FeFET. The disclosure also provides a FeFET device configured for capacitive
memory operation comprising a
semiconductor channel, a ferroelectric
gate stack disposed over the
semiconductor channel, a gate terminal connected to the ferroelectric
gate stack, a source terminal and a drain terminal connected to the
semiconductor channel, and a body terminal. The FeFET device is configured to operate in a capacitive read-out mode where capacitance is measured between the gate terminal and connected source and drain terminals at zero direct-current
gate voltage to determine a memory state.