The invention discloses a high-precision five-axis ion beam machining device with high dynamic performance and a control method thereof. The high-precision five-axis ion beam machining device with high dynamic performance comprises a digital control system, a machine frame component, an X-axis linear motion component, a Y-axis linear motion component, a Z-axis linear motion component, an A-axis direct driving component, a B-axis direct driving component, a workpiece conveying component and an ion source; and the accurate movement of the ion source is realized through the driving action in five directions. The control method comprises the following steps: when the machining along the normal direction of an optical mirror surface is carried out, the pose position of an optical mirror surface point in the coordinate system of a workpiece is converted into a coordinate point in the coordinate system of a machine tool through rotational transformation, the equal target range machining along the normal direction is carried out, and the motion pose position of each axis of the machine tool is calculated; and S-type speed machining mode is then adopted, and the speed of each axis of the machine tool at each working point is calculated. The invention has the advantages that the motion is stable, the rigidity is good, the precision is high, and the dynamic performance is high.