The invention discloses an integrated impedance-loaded sound
surface wave gas sensor based on a Si (
silicon) substrate. The integrated impedance-loaded sound
surface wave gas sensor comprises a substrate, a piezoelectric layer, an input / output
interdigital transducer, a reflective
interdigital transducer, a sensitive interdigital
electrode and a gas-sensitive thin film. The integrated impedance-loaded sound
surface wave gas sensor has the advantages that by growing one thin SiO2 (
silicon dioxide)
insulation layer and one piezoelectric layer on the
Si substrate, the good temperature characteristic is realized; the material of the
Si substrate has the characteristics of low cost,
large size and
conductivity, and can be combined with the
integrated circuit industry; the arrangement structure of the interdigital
electrode is optimized, the
sound wave reflection caused by the external sensor is reduced, and the parasitic effect caused by connecting wires is reduced; the
interdigital transducer and the sensitive interdigital
electrode are manufactured by one step, so that the simplicity in the manufacturing process is guaranteed, and the large-scale production is easily realized; the
wireless passive measuring of the sensor is realized, the sensing part which is easily influenced by outside is separated from a
signal sending part, and the application range of the sensor is widened.