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Selective batch transfer method based on phase change material, thermoelectric cell array and method of manufacturing the same

ActiveCN116364631BRealize batch transferAchieve pollution-free transferLiquid statePhysical chemistry
The application discloses a selective batch transfer method based on a phase change material, which comprises the following steps: preparing a patterned bump array on a heat-conducting substrate, coating rosin on the surface of the patterned bump array; obtaining a donor substrate with a micro-element array on the surface, and corresponding bonding the patterned bump array coated with rosin and the micro-element array; controlling the temperature of the heat-conducting substrate to change the state of the rosin, so that the micro-element array is fixedly connected with the corresponding patterned bump array, and then picking up the micro-element array from the donor substrate; bonding the picked-up micro-element array with a receptor substrate surface, and changing the rosin from a solid state to a liquid state, so that the patterned bump array is separated from the corresponding micro-element array. By using the method, batch, selective and non-polluted transfer of non-planar or planar micro-elements can be realized. The application further discloses a thermoelectric element array and a preparation method thereof.
Owner:HANGZHOU INNOVATION RES INST OF BEIJING UNIV OF AERONAUTICS & ASTRONAUTICS