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32results about How to "No increase in area" patented technology

MEMS pressure sensor and preparation method thereof

The invention discloses an MEMS pressure sensor and a preparation method thereof. The MEMS pressure sensor comprises a bulk silicon layer, a substrate, a buried oxide layer, a top silicon layer, a piezoresistor, a stress film, an ohmic contact, a metal lead, an insulating dielectric layer, a small cavity, a large cavity, an inner Wheatstone bridge and an outer Wheatstone bridge. A small cavity is arranged in the top silicon layer, a large cavity is arranged in the bulk silicon layer, and the piezoresistor is arranged right above midpoints of four sides of the two cavities and in the top silicon layer. By arranging two Wheatstone bridges which are formed by two sets of piezoresistors and are located on stress films with different thicknesses, pressure in different measuring ranges is measured respectively, and the problems that a low-measuring-range pressure sensor loses linearity in a high-pressure environment and a high-measuring-range pressure sensor is low in sensitivity in a low-pressure environment are solved to a certain extent. The pressure sensor has a wide range and also has the sensitivity of a low-pressure environment; and meanwhile, the two cavities are stacked up and down in space, so that the chip area is saved, and the integration level is improved.
Owner:SOUTHEAST UNIV

Low voltage reset circuit

The present invention provides a low-voltage reset circuit, including: a current source, a first resistor, a second resistor, a third resistor, a fourth resistor, a comparator and a voltage-controlled resistor; a current source, a first resistor, a voltage-controlled resistor and a second The resistors are connected in series in sequence, connected between the power supply voltage and the ground; the third resistor and the fourth resistor are connected in series with each other, connected between the power supply voltage and the ground; the negative input terminal of the comparator is drawn between the third resistor and the fourth resistor The sampling voltage is connected; the positive input terminal of the comparator is connected to the reference voltage extracted between the current source and the first resistor; the current source generates a current with zero temperature coefficient or a current with positive temperature coefficient through the main circuit of the bandgap reference source , which in turn is used to generate a stable reference voltage. The present invention can correctly generate a high-level pulse reset signal in the process of fast power-on of the system; in addition, when the system power supply is powered down to ultra-low voltage, the reset signal will not be released by mistake.
Owner:西安中颖电子有限公司
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