The present invention discloses a composite transparent conductive film and a preparation method thereof. The composite transparent conductive film is formed by stacking a transparent
oxide layer and a
thin metal layer, wherein the
thin metal layer is located under the transparent
oxide layer, the thickness of the
thin metal layer is 3-30nm, the thin
metal layer is in a transparent state, and the thin
metal layer has nanopores. The preparation method comprises: the step (1), preparing the thin
metal layer; the step (2), preparing the transparent
oxide layer to form a required pattern, putting the required pattern into liquid after annealing
processing to remove the thin metal layer which is not covered by the transparent oxide layer, storing the transparent oxide layer and the thin metal layer which is covered by the transparent oxide layer, and realizing the patterning of the composite transparent conductive film. The patterning process does not need photo-
mask lithography, the prepared composite transparent conductive film is good in resistivity and good in
electricity stability, has a certain optical transmissibility, and is heat resisting,
antioxidant and
erosion-resistant.