The invention discloses a large-area AZO glass
coating film
production line, which comprises a
coating film line and a conveying line, wherein the
coating film line comprises an inlet chamber, an inlet buffer chamber, an inlet conveying chamber, a
sputtering chamber, an outlet conveying chamber, an outlet buffer chamber, an outlet chamber and a quality inspection chamber, the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the
sputtering chamber, the outlet conveying chamber, the outlet buffer chamber, the outlet chamber and the quality inspection chamber are sequentiallyconnected, at least a valve is arranged between the adjacent chambers, the conveying line comprises transmission rollers and a coating film quality inspection roller, the sequentially connected transmission rollers are respectively arranged in the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the
sputtering chamber, the outlet conveying chamber, the outlet buffer chamber and the outlet chamber, the coating film quality inspection roller is arranged in the quality inspection chamber, the transmission roller in the outlet chamber is connected to the coating film qualityinspection roller, and the transmission rollers and the coating film quality inspection roller are used for conveying a coating film substrate. According to the present invention, with the large-areaAZO glass coating film
production line, the large-batch and low-cost production of various large-area coating films can be achieved, the
sputter deposition rate is high, the process has strong versatility, the
diffusion path is short, no
intermediate product is generated, and no element is evaporated, such that the preparation is fast, the efficiency is high, the
yield rate is over 95%, and the
production line is especially suitable for large-scale industrial production.