This invention discloses a multispectral imaging method and
system based on precision micro-scanning and active spectral modulation. The
system includes: a host
computer module for sending commands to synchronously control spectral switching and micro-displacement of the
image sensor, and for receiving acquired
multispectral data; a
spectral image acquisition module, consisting of an industrial
telecentric lens, a
liquid crystal tunable filter, an
image sensor, and a precision micro-scanning stage, which acquires image sequences with sub-pixel displacement in specific
spectral bands according to commands; and a
spectral image reconstruction module that uses a super-
resolution algorithm driven by both
physics and data to process the image sequences in each band and generate a high-fidelity
multispectral image cube. This invention, by integrating active spectral modulation and sub-pixel displacement technologies, solves the problem of simultaneously achieving high
spectral dimension,
high resolution, and high geometric fidelity in multispectral imaging, providing a solution for
semiconductor detection,
biomedicine, and other fields that combines ultra-high spatial detail with accurate spectral information.