7 results about "Liquid crystal tunable filter" patented technology

The invention relates to the technical field of defect detection, and discloses an integrated circuit mask plate defect multispectral cooperative detection method, which comprises the following steps: carrying out preliminary scanning on a mask plate by using a multispectral camera, selecting an optimal wave band combination, switching to a target wave band through a liquid crystal adjustable optical filter, and obtaining a high-confidence multispectral image; the optical path offset is calculated through the linear relation, the deflection angle of the micro-mirror is dynamically adjusted, and images are collected for the second time after imaging offset is compensated; image filtering and registration are completed in the FPGA, and a high-contrast fusion image is generated; if the confidence coefficient is insufficient, triggering a wave band reselection mechanism to recheck; dynamically optimizing a defect type-spectrum mapping table based on real-time detection data; when the environment fluctuation exceeds the limit, an anti-interference mode is automatically switched, and micro-mirror calibration is triggered; and monitoring performance degradation of the optical assembly in real time, switching redundant optical paths, cleaning damaged parts, triggering manual reinspection when conflicts occur, and finally generating a visual report. According to the invention, the detection accuracy of the integrated circuit mask plate can be improved.

The application discloses a kind of laser speckle testing device based on hyperspectral imaging, which realizes high-precision measurement of laser spot and speckle signal under the condition of not relying on expensive refrigeration system by optimizing optical structure and control strategy.The device includes imaging lens, lens electric control module, liquid crystal tunable filter module, ND filter wheel and its driving mechanism, two-dimensional image sensor, main control unit, three-axis acceleration sensor, PC host and the screen to be measured.The noise calibration piece pre-stored in the ND filter wheel is used to collect noise data in real time before each measurement, and noise subtraction is carried out before the filter switching to improve the timeliness and accuracy of data correction;At the same time, the integrated three-axis acceleration sensor is used to monitor vibration, and when vibration exceeding the preset threshold is detected, it is determined that the current collected data is invalid and automatically triggers re-sampling.The application has compact structure and low cost, and is suitable for laser display, projection calibration and high-brightness light source detection and other fields.

The invention discloses a multispectral imaging system based on liquid crystal tunable filtering, and relates to the technical field of spectral imaging. The system comprises an initialization module, a light quantum processing module, an imaging control module and a spectrum processing module, and high-quality entanglement source calibration and quantum gain guarantee of the initialization module, sub-nanometer wavelength dynamic compensation of the light quantum processing module and self-adaptive wave band compression acquisition of the imaging control module are realized. A complete closed loop covering photon utilization rate, signal-to-noise ratio improvement, data volume compression and calculation delay / power consumption optimization is formed through quantum accelerated unmixing and frequency domain analysis of the spectrum processing module; the method not only breaks through the minimum detectable radiance limitation of a traditional CCD / CMOS under the condition of weak light, but also improves the signal-to-noise ratio to be higher than the classic limit through the quantum entanglement and quantum information algorithm, meanwhile, the data scale is remarkably reduced under the scene of the hyperspectral channel number, and the time delay and power consumption of demixing and recognition are reduced by means of quantum acceleration.

The present invention discloses a quantitative detection device and method for the spatial distribution of blood oxygen saturation in photodynamic therapy. White light emitted by a white light LED generates a fringe image with a specific spatial frequency after passing through a digital micromirror device. The fringe image is projected onto a biological tissue to be measured through a projection lens and a first polarizer. The biological tissue generates a diffuse reflection light signal under this illumination. The diffuse reflection light signal passes through a second polarizer and a liquid crystal tunable filter. The liquid crystal tunable filter only allows the diffuse reflection light signal with a specific wavelength to pass through under computer control. The diffuse reflection light signal passing through the liquid crystal tunable filter is incident on the target surface of a CMOS camera after passing through an imaging lens. The CMOS camera transmits the collected image information into a computer to complete the acquisition of image information. The present invention can obtain the spatial distribution and its changes of tissue oxygen content during the photodynamic reaction, providing a reference basis for evaluating the degree of photodynamic reaction and further optimizing and regulating photodynamic therapy parameters to improve the efficacy of PDT.

The invention discloses a self-adaptive compressed spectrum ground remote sensing imaging method, system and device and a storage medium, belongs to the technical field of aerospace ground optical remote sensing, and solves the technical problem that the spectral resolution and the spatial resolution are difficult to synchronously improve in a traditional optical remote sensing method. Calculating surface feature reflectivity data; constructing a hyperspectral training set based on the ground object reflectivity data and a quantum efficiency curve of an image sensor of the compressed spectral imager; based on a hyperspectral training set deep learning result, obtaining an optimal response matrix of the optical filter, and aiming at different ground feature categories, respectively solving optimal optical filter response matrixes corresponding to the different ground feature categories; optical filter transmittance matrixes of the optimal optical filter response matrixes corresponding to different ground feature categories are obtained respectively, the optical filter transmittance matrixes are converted into voltage control matrixes of the K0-order liquid crystal adjustable optical filters, in-orbit configuration of the multi-spectral response curves is achieved, and the optimal compression spectral imaging performance is achieved.

The invention provides a discharge ultraviolet panoramic imaging system and method capable of expanding wave bands, and belongs to the technical field of insulation state monitoring of high-voltage equipment, the system comprises an upper computer, a wavelength tunable filtering device, a multi-view-field panoramic imaging module, a self-adaptive fusion module and a panoramic splicing module, the control module is used for controlling transmission wavelength adjustment, servo turntable movement and data processing; the wavelength tunable filtering device comprises a liquid crystal tunable filter and is used for executing transmission wavelength adjustment; the multi-view-field panoramic imaging module is used for synchronously collecting ultraviolet and visible light images of a target wavelength through rotary scanning; the self-adaptive fusion module is used for dynamically fusing the ultraviolet image and the visible light image; and the panoramic stitching module is used for performing feature matching and panoramic stitching on the dynamically fused image.

This invention discloses a multispectral imaging method and system based on precision micro-scanning and active spectral modulation. The system includes: a host computer module for sending commands to synchronously control spectral switching and micro-displacement of the image sensor, and for receiving acquired multispectral data; a spectral image acquisition module, consisting of an industrial telecentric lens, a liquid crystal tunable filter, an image sensor, and a precision micro-scanning stage, which acquires image sequences with sub-pixel displacement in specific spectral bands according to commands; and a spectral image reconstruction module that uses a super-resolution algorithm driven by both physics and data to process the image sequences in each band and generate a high-fidelity multispectral image cube. This invention, by integrating active spectral modulation and sub-pixel displacement technologies, solves the problem of simultaneously achieving high spectral dimension, high resolution, and high geometric fidelity in multispectral imaging, providing a solution for semiconductor detection, biomedicine, and other fields that combines ultra-high spatial detail with accurate spectral information.